高光谱性能光学薄膜研究进展  

Research progress of advanced high-spectral-performance optical coatings

作　　者：焦宏飞[1] 汲小川 张锦龙[1] 程鑫彬[1] 王占山[1] JIAO Hongfei;JI Xiaochuan;ZHANG Jinlong;CHENG Xinbin;WANG Zhanshan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2591-2607,共17页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61975155,No.62061136008,No.62275196);上海市科学技术委员会科技计划项目(No.20JC1414600,No.21JC1406100);上海市教育委员会“曙光”计划项目(No.17SG22);上海市级科技重大专项-人工智能基础理论与关键核心技术(No.2021SHZDZX0100);中央高校基本科研业务费专项资金资助项目。

摘　　要：高光谱性能光学薄膜是国家重大光学工程、光电子产业的基石。为了提高光学薄膜的光学性能并开发精确制备技术,现有研究主要围绕设计理念、监控技术和薄膜材料等方面展开。目前,薄膜技术已经取得了长足进步,能实现高光谱性能光学薄膜的鲁棒性设计,多种基于高光谱性能光学薄膜的精确制备技术相继被提出。从薄膜设计、精确制备技术以及薄膜材料几方面出发,本文对现代高光谱性能光学薄膜研究进行了回顾和讨论,并对高性能光学薄膜潜在的挑战和进一步研究方向进行了展望。High-spectral-performance optical coatings constitute the cornerstone of major optical engineering and optoelectronics industries. To improve the spectral performance of optical coatings and develop precise fabrication technology,the existing research focuses on the design methodology,monitoring technology,and thin film materials. At present,the high-spectral-performance of optical coatings has led to the realization of robust designs. Additionally,various precise preparation techniques based on high-performance optical coatings have been proposed. The research conducted on advanced high-performance optical coatings is reviewed and discussed from the perspectives of coating design,monitoring technology,and thin film materials. The potential challenges are also summarized and prospective studies on advanced high-spectral-performance optical coatings are outlined.

关 键 词：光学薄膜及器件 鲁棒性设计 光学监控 薄膜制备 计算制造 

分 类 号：TB43[一般工业技术] O484[理学—固体物理]