极紫外-真空紫外光学薄膜元件的研究进展  

Research progress of multilayer optical elements in extreme ultraviolet and vacuum ultraviolet

作　　者：齐润泽 张锦龙[1] 黄秋实[1] 张众[1] 王占山[1] QI Runze;ZHANG Jinlong;HUANG Qiushi;ZHANG Zhong;WANG Zhanshan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2639-2654,共16页Optics and Precision Engineering

基　　金：中国科学院战略性先导科技专项(No.XDA15018400);国家自然科学基金资助项目(No.12003016);上海市教育委员会创新计划资助项目(No.2017-01-07-00-07-E00063)。

摘　　要：极紫外-真空紫外高性能薄膜光学元件的发展对天文、材料、物理等学科具有重要意义。本文主要介绍了同济大学精密光学工程技术研究所在高性能极紫外-真空紫外薄膜光学元件的最新进展。展示了极紫外-真空紫外波段(10~200nm)用薄膜反射镜、薄膜单色器和薄膜起偏器的研究成果。为适应不同的使用需求和环境,开展薄膜内部微结构的综合表征及其物理化学机制的研究,形成了一套完备的极紫外-真空紫外薄膜光学元件表征、优化、制备技术体系,有效提升了均匀性、反射效率、带宽、稳定性和偏振度等薄膜元件核心性能。高性能的极紫外-真空紫外薄膜光学元件研制技术将为我国大型地面科学装置及空间天文观测设备提供强有力的支撑。Extreme ultraviolet(EUV)and vacuum ultraviolet(VUV)high-performance,thin-film optical elements considerably improve the capability of conducting high-precision observations and contribute to the development of materials as well as advancements in astronomy,physics,and other disciplines. According to the different application requirements and physical and chemical properties of materials,the Institute of Precision Optical Engineering(IPOE)at Tongji University successfully developed high-performance thin film mirrors,which could meet the application requirements of entire EUV and VUV wavelength ranges(10-200 nm). This study presents the research progress obtained at the IPOE on the development of EUV and VUV thin-film optical elements. In this paper,the features of thin-film mirrors,monochromators,and polarizers for EUV vacuum band operation are presented. By investigating and characterizing the film’s internal microstructure and its physical and chemical mechanism,a system of film representation,optimization,preparation is established. Additionally,the thickness uniformity,reflectance,response bandwidth,stability,and polarization are improved. The developed mirrors have already been applied to domestic,large-scale scientific instruments(from ground to space).

关 键 词：极紫外-真空紫外 薄膜元件 均匀性 窄带宽 稳定性 高反射效率 

分 类 号：O434.2[机械工程—光学工程]