等离子体诊断用多层膜X射线成像光学研究进展  

Research progress of multilayer X-ray imaging optics for plasma diagnostics

作　　者：伊圣振[1] 黄秋实[1] 齐润泽 张众[1] 王占山[1] YI Shengzhen;HUANG Qiushi;QI Runze;ZHANG Zhong;WANG Zhanshan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2783-2792,共10页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.11805212);国家重点研发计划项目(No.2019YFE03080200)。

摘　　要：发展精密X射线诊断技术对于惯性约束聚变(ICF)物理过程的研究具有重要意义。本文对同济大学精密光学工程技术研究所在高性能多层膜掠入射X射线光学方面的最新进展进行了较全面的介绍。针对ICF高时空分辨、能谱分辨和高集光效率诊断需求,从多通道掠入射X射线成像技术、多层膜掠入射X射线成像技术及应用效果几个方面,对目前研究进展进行了系统介绍。在多通道掠入射X射线成像方面主要介绍高分辨多通道KB成像系统及其高精度在线装调技术。在实现空间分辨优于5μm、十六通道成像的基础上,采用“物-诊断物镜-像”的高复位精度集成指示技术,有效保障了多通道KB系统的装置应用效果。在多层膜掠入射X射线成像方面,本文主要介绍多层膜分光器件的能谱调控和制备技术以及系统的精密瞄准技术。目前,多套基于多层膜阵列器件的多能谱X射线诊断设备已在激光装置上得到广泛应用,空间分辨率在3~5μm,诊断能点达到4个,技术指标显著优于国外同类器件,为国内ICF诊断提供了有力支撑。The development of precision X-ray diagnostics is important for examining the physical processes in inertial confinement fusion(ICF). The latest advances in high-performance multilayer grazing X-ray optics at the Institute of Precision Optical Engineering of Tongji University are comprehensively introduced herein. To serve the diagnostic needs of ICF with high spatial,temporal,and spectral resolutions and high efficiency,the current research progress is systematically introduced in terms of multichannel grazing X-ray imaging technology and multilayer grazing X-ray imaging technology with their application effects. Multichannel grazing X-ray imaging is mainly introduced in terms of the multichannel KB imaging microscope and its high-precision online alignment technology. To achieve high spatial resolution(<5μm)and sixteen imaging channels,high-reset-precision integrated "object-diagnostic microscope-image" indication technology was developed;this effectively guarantees the applicability of the multichannel KB microscope. Multilayer grazing X-ray imaging provides spectral regulation by use of X-ray multilayers,as well as precision aiming technology for online alignment. Several sets of multispectral X-ray diagnostic equipment based on an array of multilayer mirrors have been widely used in domestic laser facilities with spatial resolutions of 3-5 μm and four energy points. The key technical performance indicators are significantly better than those of similar technology from abroad;this affords strong support for domestic ICF diagnostics.

关 键 词：惯性约束聚变 等离子体诊断 多层膜 Kirkpatrick-Baez显微镜 高时空分辨 

分 类 号：O434.1[机械工程—光学工程]