脉冲激光损伤阈值测量技术及光学元件损伤性能  

Pulsed laser-induced damage threshold measurement and damage performance of optical components

作　　者：马彬[1] 侯志强 焦宏飞[1] 张锦龙[1] 沈正祥[1] 程鑫彬[1] 王占山[1] MA Bin;HOU Zhiqiang;JIAO Hongfei;ZHANG Jinlong;SHEN Zhengxiang;CHENG Xinbin;WANG Zhanshan(Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,Shanghai Frontiers Science Center of Digital Optics,Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与应用专业技术服务平台,上海200092

出　　处：《光学精密工程》2022年第21期2805-2826,共22页Optics and Precision Engineering

基　　金：国家重点研发计划项目(No.2021YFB3601402);国家自然科学基金资助项目(No.61975153)。

摘　　要：基于我国强激光装置建设和工程任务需求,同济大学建立了基于纳秒与飞秒脉冲激光的自动化激光损伤阈值测试系统,该系统具有微米与亚微米级损伤的自动检测、定位复检、瞬态诊断和原位测量功能,测试流程基于ISO标准与光栅扫描等方法;此外,通过国际损伤阈值评测,实现了测量结果的国际对标。十多年来,利用该激光损伤阈值测试系统,我们系统研究了基板研磨与抛光工艺、超声清洗与表面残留、薄膜设计与大角度抑制、三维电场模拟与透镜聚焦效应、镀膜材料选择与氧化工艺、节瘤几何成型控制与平坦化、环境保持与传递控制、镀膜优化与辅助工艺、退火工艺与后处理技术、存放环境与人为污染等各类因素对激光损伤阈值的影响和作用规律;根据不同研究对象在不同参数和工作条件下的激光损伤特征,研究了激光损伤诱因、损伤演化及损伤机理;此外,基于泵浦-探测成像技术研究了透射元件的损伤动力学特性。激光损伤阈值表征与损伤溯源为课题组超高阈值和大尺寸激光薄膜器件的研制提供了关键的支撑技术,同时,为国内外数十家科研机构、高校院所和企业提供了高置信度的激光损伤阈值测试服务。According to China’s construction and engineering mission requirements for high-power laser devices,Tongji University has established a nanosecond-and femtosecond-pulse-laser automated laser-induced damage threshold test system. The system can perform automatic detection,location reinspection,transient diagnosis,and in situ measurement of micrometer and submicrometer damage via a testing process based on the ISO standard and raster scan method. In addition,through extensive academic exchanges and international damage threshold evaluation,an international standard calibration of the measurement results was performed. Utilizing this test system for over a decade,we systematically studied the effects of the following factors on the laser-induced damage threshold:substrate lapping and polishing,ultrasonic cleaning and surface residue,thin film design and large-angle suppression,three-dimensional electric field simulation and the lens-focusing effect,coating material selection and oxidation,geometric shaping control and planarization of nodules,environment retention and transfer control,coating optimization and auxiliary processes,annealing and post-processing,storage environment and anthropogenic pollution,and others.According to the laser damage characteristics of different objects under different parameters and working conditions,the inducement,evolution,and mechanism of laser damage are studied. In addition,the laser damage dynamic characteristics of transmission elements are studied based on pump-probe imaging. Laserinduced damage threshold characterization and damage precursor tracing are the key technologies used by our research group in the development of ultra-high-threshold and large-size laser thin-film devices. Notably,our system provides high-confidence laser-induced damage threshold testing services for several domestic and foreign scientific research institutions,universities,and enterprises.

关 键 词：激光损伤 自动化测试系统 光栅扫描 人工缺陷 泵浦-探测 损伤演化 光学薄膜 

分 类 号：O436[机械工程—光学工程]