多源一体化微电源  

Micro power supply with multi-source integrated

作　　者：王赫[1] 张丽丽[1] 李宝清[2] 高鹏[1] WANG He;ZHANG Lili;LI Baoqing;GAO Peng(Tianjin Institute of Power Sources,Tianjin 300384,China;Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China)

机构地区：[1]中国电子科技集团公司第十八研究所,天津300384 [2]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《电源技术》2022年第11期1339-1342,共4页Chinese Journal of Power Sources

基　　金：2021年度国防科技重点实验室基金项目(多源一体化微电源系统)。

摘　　要：针对无线传感网络节点和5G装置需求,开展多源一体化微电源研究,详细论述了多源集成微电源设计、单体电池制备与多源集成技术等。基于物理气相沉积技术分别研制了高效光伏电池、温差发电器件,以及薄膜储能电池,对各自的电池性能进行了优化。采用基于PCB板基的三维异构集成技术,将多源发电、微型储能及电源控制芯片一体化集成,集成一体化微电源体积3.60 cm^(3)(包括插孔引线位),多源发电最大功率密度达到30.00 mW/cm^(2),系统额定输出功率密度达到1.04 mW/cm^(2)。In view of the requirements of wireless sensor network node and micro-system equipment of 5G network for micro power application with high reliability and performance,the design of micro-system of power sources,the development of various devices,and the integration technology of multi-source system were investigated.All the devices with micro size,including high efficiency solar cells,thermoelectric power generation devices and thin film Libattery,were developed,based on the physical vapor deposition process.It has made breakthroughs in the technology of 3D heterogeneous integration basing on the PCB board.Multiple generation devices,thin film Li-ion batteries and power management of multi-source,were integrated in the volume of 3.6 cm^(3),including the sockets and lead positions.The micro power supply system has the max generator power density of 30 mW/cm^(2),and the nominal output power under working mode is 1.04 mW/cm^(2).

关 键 词：多源发电 三维异构集成 微电源 

分 类 号：TM912[电气工程—电力电子与电力传动]