基于级联AWG的光谱分析芯片设计  

Design of Spectral Analysis Chip Based on Cascaded AWG

作　　者：韩征 恽斌峰 HAN Zheng;YUN Binfeng(Advanced Photonics Center,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学电子科学与工程学院先进光子学中心,南京210096

出　　处：《光子学报》2022年第11期202-211,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(No.62171118)。

摘　　要：基于低损耗氮化硅光波导平台,采用一个1×6阵列波导光栅(AWG)与六个仅中心波长不同的1×25AWG两级级联的架构,优化设计了集成光谱分析芯片。仿真结果表明,该光谱分析芯片的工作带宽、波长分辨率、最小通道插损分别为75 nm、0.5 nm和4.9 dB,且通道间最小相邻、非相邻串扰约为-27.7 dB、-23.0 dB,最大相邻、非相邻串扰约为-22.6 dB、-12.5 dB。With fast developments and wide applications of spectrum analysis,there is a great requirement for the miniaturization and chiplization of spectrum analyzer.Spectrometers based on photonic integrated chips have great advantages in size,weight and power consumption,which can be applied in many fields such as chemical and biological sensing,spectroscopy,spectral imaging and radio frequency spectrum analysis,etc.Some on-chip spectrum analyzing schemes have been proposed,such as cascading Arrayed Waveguide Grating(AWG) with Micro-Ring Resonators(MRR) and cascading multi-stage AWGs.For the scheme of cascading AWG with tunable MRRs,a long measurement time is needed due to its wavelength scanning mechanism and the crosstalk is relatively large.On the contrary,spectrum analysis chip based on cascade AWGs without wavelength scanning processes can achieve much faster spectrum acquisition.Arrayed Waveguide Grating(AWG),as a planar dispersive device,is one of the effective ways to be used as an on-chip spectrometer since it has a compact size and can be integrated with other components easily.However,it is rather difficult to achieve high resolution and large working wavelength range simultaneously with just single AWG.This intrinsic contradiction can be alleviated by cascading several AWGs.On the other hand,silicon nitride waveguide,which has the merits of low loss,transparent from visible to infrared and compatible with the Complementary Metal-Oxide-Semiconductor(CMOS) processes,has become one of the main photonic integration platforms.Various silicon nitride AWGs with low losses have been demonstrated.In this paper,a spectrum analysis chip constructed by cascading two silicon nitride AWGs is proposed,designed and optimized.In the proposed spectrum analysis chip,a silicon nitride 1×6 AWG with high resolution is cascaded with six 1×25 AWGs with coarse resolutions.By using the periodic routing property of the 1×6 AWG and setting its Free Spectral Range(FSR) equal to the channel spacing of the 1×25 AWG,spectral interleavi

关 键 词：片上集成光谱仪 阵列波导光栅 光谱分析芯片 色散器件 集成光学器件 

分 类 号：TN256[电子电信—物理电子学]