一种应用于高粘度气体的科里奥利质量流量控制器的研究  

Research on Coriolis Mass Flow Controller for High Viscosity Gas

作　　者：周杰 范佩佩 于苗 白永恒 ZHOU Jie;FAN Pei-pei;YU Miao;BAI Yong-heng(Xi'an Perui Power Semiconductor Converter Technology Co.,Ltd.,Xi'an 710077,China)

机构地区：[1]西安派瑞功率半导体变流技术股份有限公司,西安710077

出　　处：《价值工程》2022年第32期166-168,共3页Value Engineering

摘　　要：质量流量计分为直接测量和间接测量或推导式测量和补偿式测量,广泛应用于各种气体质量流量测试场合。科里奥利质量流量计(Coriolis Mass Flow-CMF)采用直接测量的方法,其原理是流体在旋转体系中做直线运动时产生的科里奥力和流体的质量流量成正比。具有稳定度高、可靠性高、量程大、可直接测量管道内流体的质量,在半导体制造中常用来测量弥散性高粘度的流体[1]。Mass flow meters are divided into direct measurement and indirect measurement,or derivative measurement and compensation measurement,which are widely used in various gas mass flow testing occasions.Coriolis Mass Flow CMF adopts a direct measurement method.Its principle is that the Coriolis force generated when the fluid moves in a straight line in a rotating system is proportional to the mass flow of the fluid.It has high stability,high reliability,large measuring range,and can directly measure the quality of the fluid in the pipeline.It is often used to measure the dispersive high viscosity fluid in semiconductor manufacturing.

关 键 词：科里奥利 质量流量 质量流量计 测量 

分 类 号：TN911.72[电子电信—通信与信息系统]