陶瓷片上石蜡的清洗工艺  

Cleaning Process of Paraffin on the Ceramic Substrate

作　　者：吴民[1,2] 王宇澄 校国忠 WU Min;WANG Yucheng;XIAO Guozhong(The 14th Research Institute of CETC,Nanjing 210039,China;Glarun Technology Nanjing Glarun Microwave Devices Co.,ltd.,Nanjing 210000,China)

机构地区：[1]中国电子科技集团公司第十四研究所,南京210039 [2]国睿科技南京国睿微波器件有限公司,南京210000

出　　处：《电子工艺技术》2022年第6期324-326,337,共4页Electronics Process Technology

基　　金：装备预先研究重点基金项目(61404130404)。

摘　　要：从陶瓷片表面黏附石蜡的清洗应用出发,制定了多种清洗试验方案,采用能谱仪检测清洗后碳元素的分布,并通过环氧胶将陶瓷片与镀金可伐片粘接,对多组样品开展剪切试验并分析强度数据,从而比较清洗效果。采用M617清洗后,根据强度均值与清洗时间的二次回归曲线,得到理论上的强度最大值,与实测数据比较误差较小。Based on the cleaning application of paraffin adhered on the surface of ceramic sheets,a variety of cleaning test plans are formulated.The distribution of carbon elements after cleaning is observed and analyzed by energy dispersive spectrometer.Through bonding the ceramic substrate with gold plated Kovar boards by using epoxy resin to conduct shearing experiment on multicomponent samples,the shearing strength data are analyzed to compare the cleaning effects.According to the quadratic regression curve between mean intensity and cleaning time by using M617,the theoretical maximum strength is obtained,and the error is small compared with the measured data.

关 键 词：石蜡 环氧胶粘剂 剪切强度 清洗溶剂 

分 类 号：TN405[电子电信—微电子学与固体电子学]