电子光学系统自优化设计的研究  

Research on Self-Optimizing Design of Electron Optical System

作　　者：张健 耿志辉 金琦 张瑞 ZHANG Jian;GENG Zhihui;JIN Qi;ZHANG Rui(Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China;University of Chinese Academy of Sciences,Beijing100049,China)

机构地区：[1]中国科学院空天信息创新研究院,北京100094 [2]中国科学院大学,北京100049

出　　处：《真空科学与技术学报》2022年第9期670-677,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(61531002,61571418);国家磁约束核聚变能发展研究专项项目(2018YFE0305100)。

摘　　要：电子光学软件Egun是用于计算二维静电场和静磁场状态下电子轨迹的专业软件。它在设计Pierce电子枪等电子光学系统方面比较成功,而且计算速度快,至今仍被广泛应用。Egun在真空电子器件的模拟仿真中,对设计的电子光学系统电子注层流特性的评估,仅能通过对电子轨迹的观察来判断其层流性的好坏,该软件并没有给出定量的评估指标参数,且对设计参数的修改十分繁琐,缺乏自动优化功能,极大地影响了Egun优势的发挥。本文提出了交叉率和波动率评估指标来衡量电子注的层流特性并开发了一套自优化软件。模拟仿真结果表明:交叉率和波动率可以准确地定量评估电子注层流特性的好坏;根据模拟仿真分析,当电子注交叉率低于3%且波动率低于30%时,电子注的层流特性可以满足设计需求。层流特性评估指标—交叉率和波动率也为电子光学系统自动优化寻找最佳参数值提供了目标评估参数,极大地减少人员和物力的消耗。Electron optical software Egun is a professional software used to calculate the electron trajectories in two-dimensional electrostatic field and static magnetic field. It is successful in designing Pierce electron gun and other electron optical systems and has a fast calculation speed. So far, it is still widely used. However, in the simulation of vacuum electronic devices, the evaluation of the electron laminar properties of the designed electron optical system can only judge the laminar properties through the observation of the electron trajectories. The software does not give quantitative evaluation index parameters, and the modification of design parameters is very cumbersome and lacks an automatic optimization function, which greatly affects the exertion of the advantages of Egun. In this paper, two evaluation indexes, crossover rate and volatility, are proposed to measure the electron laminar properties,and a set of self-optimizing software is developed. The simulation results show that the two indexes of crossover rate and volatility can accurately and quantitatively evaluate the electron laminar properties;when the electron trajectories crossover rate is less than 3% and the volatility is less than 30%, the electron laminar properties can meet the design requirements. The evaluation index of electron laminar properties-crossover rate and volatility also provides target evaluation parameters for the automatic optimization of the electron optical system to find the best parameter value, which will greatly reduce the consumption of personnel and material resources.

关 键 词：电子光学系统 层流特性 评估指标 自优化设计 

分 类 号：O463.1[机械工程—光学工程]