基于Fe-Ga合金敏感栅式应力传感器  

Sensitive gate type stress sensor based on Fe-Ga alloy

作　　者：曾宇露[1,2] 刘方晨 王欢 万家鑫 黄森林 ZENG Yulu;LIU Fangchen;WANG Huan;WAN Jiaxin;HUANG Senlin(School of Electrical Engineering,Nanchang Institute of Technology,Nanchang 330099,China;Jiangxi Province Key Laboratory of Precision Drive&Control,Nanchang 330099,China)

机构地区：[1]南昌工程学院电气工程学院,江西南昌330099 [2]江西省精密驱动与控制重点实验室,江西南昌330099

出　　处：《传感器与微系统》2022年第12期10-13,18,共5页Transducer and Microsystem Technologies

基　　金：江西省教育厅科学技术研究项目(GJJ180936,GJJ201929);江西省科技厅重大科技研发专项项目(20203ABC28W016);江西省林业局创新专项项目(2020—07)。

摘　　要：针对现有磁致伸缩应力传感器的不足,设计了一种铁镓(Fe-Ga)合金敏感栅式应力传感器。传感器由Fe-Ga片、霍尔元件、线圈及U型磁芯构成,其中,Fe-Ga片设计为大柔度的敏感栅结构。建立了传感器在应力作用下的输出特性模型,利用有限元软件对不同应力、不同线圈电流作用下的传感器输出电压特性进行仿真分析,最后通过实验验证了输出特性模型、有限元仿真结果的准确性及传感器的可行性。实验结果表明:对0.10,0.15,0.20 A的激励电流,传感器拉力灵敏度分别为9.12,8.7,8.52 mV/MPa,压力灵敏度分别为7.08,7.34,7.49 mV/MPa,传感器灵敏度高,有较好的应用研究价值。Aiming at the shortcomings of existing magnetostrictive stress sensors, a Fe-Ga alloy sensitive gate type stress sensor is designed.The sensor consists of Fe-Ga foil, Hall sensor, coil and U-shaped magnetic core, and in which, Fe-Ga foil is designed as a highly flexible sensitive gate structure.The output characteristic model of the sensor under stress is established, and the finite element software is used for simulation analysis on the output voltage characteristics of the sensor under different stress and different coil currents.Finally, the accuracy of the output characteristic model and finite element simulation results and the feasibility of the sensor are verified by experiment.Experimental results show that under excitation currents of 0.10,0.15 and 0.20 A,tensile sensitivities of the sensor are 9.12,8.7 and 8.52 mV/MPa, respectively, and the pressure sensitivities are 7.08,7.34 and 7.49 mV/MPa, respectively.The designed sensor has high sensitivity and good application research value.

关 键 词：铁镓合金 应力传感器 输出特性 有限元仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]