基于多壁碳纳米管的电阻式温度传感器  

Resistive temperature sensor based on MWCNT

作　　者：赵珠杰 梁庭[1] 王凯 雷程[1] ZHAO Zhujie;LIANG Ting;WANG Kai;LEI Cheng(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;Tianjin Weijia Environmental Technology Co Ltd,Tianjin 300450,China)

机构地区：[1]中北大学动态测试技术省部共建国家重点实验室,山西太原030051 [2]天津伟加环境科技有限公司,天津300450

出　　处：《传感器与微系统》2022年第12期67-70,共4页Transducer and Microsystem Technologies

基　　金：山西省自然科学基金资助项目(201801D221203);高等学校科技创新资助项目(1810600108MZ)。

摘　　要：为解决热敏型电阻式温度传感器线性度差、可测温度范围小等问题,介绍了一种以多壁碳纳米管(MWCNT)为温敏材料的电阻型温度传感器。利用微机电系统(MEMS)工艺制备叉指电极作为热敏电阻,在80℃下将MWCNT超声分散溶液涂覆组装在电极上,使用原子力显微镜(AFM)和扫描电子显微镜(SEM)对MWCNT进行形貌表征,并搭建温度测试平台对传感器进行性能测试。测试结果表明:在40~340℃范围内,传感器的电阻随着温度的上升而下降,传感器的灵敏度约-122.230Ω/℃,线性相关系数为0.995 71;200℃时,传感器响应时间为5 s,恢复时间为4 s。同时,该传感器的迟滞性小,稳定性良好。A resistive temperature sensor using multi-walled carbon nanotube(MWCNT)as temperature-sensitive material is introduced to solve the problems of poor linearity and narrow measurable temperature range of thermosensitive resistive temperature sensor.The sensor utilizes micro-electro-mechanical system(MEMS)process to prepare interdigital electrodes as thermistors, and ultrasonically dispersed MWCNT solutions are coated and assembled on electrodes at 80 ℃.The MWCNT are characterized morphologically using atomic force microscope(AFM)and scanning electron microscope(SEM),and a temperature test platform is built to test the performance of sensor.The test results show that the resistance of the sensor decreases with temperature increasing in the range of 40~340 ℃.The sensitivity of the sensor is about-122.230 Ω/℃ and the linear correlation coefficient is 0.995 71.At 200 ℃,the sensor response time is 5 s and the recovery time is 4 s, while the sensor has little hysteresis and good stability.

关 键 词：多壁碳纳米管 电阻式传感器 微机电系统工艺 温敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]