电子级3-乙氧基丙酸乙酯的提纯制备  

The Purification of Electronic Grade Ethyl 3-ethoxypropionate

作　　者：杨长青 邹德强 王大松 马群 YANG Chang-qing;ZOU De-qiang;WANG Da-song;MA Qun(Beijing Institute of Chemical Reagents Co.,Ltd.,Beijing 102607,China;Dalian First Organic Chemical Co.,Ltd.,Dalian 116308,China)

机构地区：[1]北京化学试剂研究所有限责任公司,北京大兴102607 [2]大连第一有机化工有限公司,辽宁大连116308

出　　处：《化学试剂》2022年第12期1782-1788,共7页Chemical Reagents

摘　　要：电子级3-乙氧基丙酸乙酯(EEP)是集成电路(IC)和液晶面板(LCD)行业必须的清洗剂和溶剂。着重研究适合大规模生产的电子级EEP的提纯工艺,实验采用工业级EEP为原料,使用吸附、离子交换、反应精馏等工艺进行提纯,产品满足电子级3-乙氧基丙酸乙酯SEMI G3指标要求。分析3-乙氧基丙酸乙酯的分解原因和精馏液泛的原因,通过改变交换基来减少EEP的分解,通过计算对液泛速度和塔径进行修正,解决液泛问题。Electronic grade ethyl 3-ethoxypropionate(EEP)is a necessary cleaning agent and solvent in the integrated circuit(IC)and liquid crystal display(LCD)industry.The purification process of electronic grade EEP suitable for large-scale industrial production was studied.Industrial EEP was used as the raw material in the experiment.Many processes including adsorption,ion exchange,and reactive distillation were applied in the purification,and the resulted product met the requirements of SEMI G3 for electronic grade EEP.The reasons for the decomposition of ethyl 3-ethoxypropionate and the flooding of distillation were analyzed.The decomposition of EEP was reduced by changing the exchange basis.The problem of distillation flooding was solved by calculation to correct the flooding speed and tower diameter.

关 键 词：电子级3-乙氧基丙酸乙酯(EEP) 提纯 分子筛 离子交换 精馏 液泛 

分 类 号：TQ421.4[化学工程]