基于最小二乘拟合波矢估计的角位移测量方法  

Angular displacement measurement method based on least square fitting wave vector estimation

作　　者：庞静茹 谭景升 牛亦琰 刘逸志 潘卫清[1] PANG Jingru;TAN Jingsheng;NIU Yiyan;LIU Yizhi;PAN Weiqing(College of Science,Zhejiang University of Science and technology,Hangzhou 310023,China)

机构地区：[1]浙江科技学院理学院,浙江杭州310023

出　　处：《光学技术》2022年第5期589-596,共8页Optical Technique

基　　金：国家自然科学基金(11904318)。

摘　　要：为了实现微小角度的精密测量,提出一种基于最小二乘拟合波矢估计实现角位移测量的方法,利用全息理论和采样定理二次曝光记录两幅全息图,通过角谱分析求解测量光相位信息的相关参数,进行波矢估计并求解两次波矢存在的角位移关系,使用计算机仿真验证了该方法的可行性和准确性并分析了像素尺寸、像素数和信噪比对测量精度的影响,用实验验证了理论计算结果与实验测定结果的一致性。实验表明,在CCD像素数不低于1000pixel,像素尺寸不小于4.6μm,信噪比不低于20dB的情况下,测量方法可实现3.9°范围内的准确测量,测量的均值误差控制在2.5×10^(-7)rad内,测量的标准差控制在2.0×10^(-7)rad内。To achieve precise measurement of micro angle,a method of angular displacement measurement based on least square fitting wave vector estimation is proposed,the method uses the holographic theory and sampling theorem to record two holograms by secondary exposure,and calculates the relative parameters of the measured optical phase information by angle spectrum analysis,estimates the angular displacement relationship between the two wave vectors.The feasibility and accuracy of this method are verified by computer simulation,and the effects of pixel size,pixel number,and signal-to-noise ratio on measurement accuracy are analyzed.The consistency between theoretical calculation results and experimental results is verified by experiments.The experiment shows that when the number of CCD pixels is not less than 1000pixels,the pixel size is not less than 4.6μm,and the signal-to-noise ratio is not less than 20dB,the measurement method can achieve accurate measurement within the range of 3.9°,and the mean error of measurement is controlled within 2.5×10^(-7) rad,the standard deviation of measurement was controlled within 2.0×10^(-7) rad.

关 键 词：数字全息 最小二乘拟合 波矢估计 角位移测量 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]