化学气相沉积炉用气体预热装置优化设计  

Optimal design of a gas preheating device for chemical vapor infiltration furnace

作　　者：施伟伟 董一巍 李明 龚雨晗 王晓燕 张钰莹 颜伊靖 SHI Weiwei;DONG Yiwei;LI Ming;GONG Yuhan;WANG Xiaoyan;ZHANG Yuying;YAN Yijing(Xi’an Aviation Brake Technology Co.,Ltd.,Xingping 713100,Shaanxi,China;School of Aerospace Engineering,Xiamen University,Xiamen 361005,Fujian,China)

机构地区：[1]西安航空制动科技有限公司,陕西兴平713100 [2]厦门大学航空航天学院,福建厦门361005

出　　处：《中国工程机械学报》2022年第5期430-433,共4页Chinese Journal of Construction Machinery

摘　　要：为提高化学气相沉积炉气体预热装置的预热效率,降低其在炉内反应区的占用空间,提高产品装料量,在现有圆筒式预热装置结构的基础上进行了优化改进,通过改变气体流动方式,达到充分混合预热的目的,并且使气体流通路径长度延长约50%,热辐射面积提高1倍以上。仿真结果表明:综合预热效率较改进前提高了2倍以上。同时,在预热效率相当的情况下,改进后的圆筒式预热装置比多孔板叠加式预热装置节省约20%的装料空间。In order to improve the preheating efficiency of the gas preheating device of the chemical vapor infiltration furnace,reduce the space occupied by the reaction zone in the furnace,and increase the product charge,the structure of the existing cylindrical preheating device is optimized Improvement.By changing the gas flow mode,the purpose of fully mixing and preheating is achieved,and the gas circulation path is extended by about 50%,and the thermal radiation area is increased by more than 1 time.The simulation results show that the comprehensive preheating efficiency can be increased by more than 2 times compared with the previous improvement.At the same time,when the preheating efficiency is equivalent,the improved cylindrical preheating device will save about 20%of the charging space compared with the perforated plate stacking preheating device.

关 键 词：预热装置 路径 热辐射 

分 类 号：TB21[一般工业技术—工程设计测绘]