基于带通滤光片的平面工件面形干涉测量方法  

Interferometry Measurement Method of Planar Workpiece Surface Profile Based on Bandpass Optical Filters

作　　者：王凯 闫英 周平 WANG Kai;YAN Ying;ZHOU Ping(School of Mechanical Engineering,Dalian University of Technology,Dalian 116033,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116033

出　　处：《机械工程师》2022年第12期63-66,共4页Mechanical Engineer

摘　　要：针对目前工业领域对平面零件面形低成本测量需求,提出了一种基于带通滤光片的干涉测量方法。该方法根据分振幅干涉的原理,使用两个中心波长相差10 nm的滤光片分别放置在工业摄像头上,拍摄两组准单色光干涉图样,通过对比处理实现干涉条纹级数排序。然后使用Zernike多项式对完成排序的干涉图样进行拟合,获得环形工件面形,最后应用最小二乘法摆正,获得所测工件的面形精度信息。通过理论分析及实测对比验证了该方法的可行性。Aiming at the low-cost measurement requirements of planar workpiece in the industrial field,an interferometric measurement method based on band-pass optical filters is proposed.According to the principle of amplitude-splitting interference,the method uses two optical filters with a center wavelength difference of 10 nm,respectively,placed on an industrial camera to capture two quasi-monochromatic light interference images,and determine the ordinal of interference stripes.The Zernike polynomial is used to fit the sorted interference images to obtain the surface profile of the planar workpiece,and finally the least squares method is applied to straighten the surface profile of the measured workpiece.Theoretical analysis and experimental comparison verify the feasibility of the method.

关 键 词：滤光片 分振幅干涉 图像处理 

分 类 号：TH744.3[机械工程—光学工程]