Multi-channel laser interferometer based on automatic frequency stabilization system for improving coordinate measurement accuracy  

作　　者：PANG Chengkai ZHANG Qiongqiong ZHANG Hongqiao HUANG Haiyan DENG Zejiang WU Guang 

机构地区：[1]State Key Laboratory of Precision Spectroscopy,East China Normal University,Shanghai,200241,China [2]Chongqing Key Laboratory of Precision Optics,Chongqing Institute of East China Normal University,Chongqing,401120,China [3]Collaborative Innovation Center of Extreme Optics,Shanxi University,Taiyuan,030006,China

出　　处：《Optoelectronics Letters》2022年第10期588-594,共7页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.11774095,11804099,and 11621404);the Research Funds of Happiness Flower ECNU(No.2021ST2110).

摘　　要：A multi-channel laser interferometer(MCLI)is proposed to improve the coordinate measurement accuracy.A 780 nm external cavity laser is locked on the D2 line of ^(87)Rb atom by polarization spectroscopy,and a high frequency stabilized laser source is obtained with a linewidth of 385.8 k Hz at root mean square(RMS).The interferometers share the stabilized source and individually install on 4 axes of a coordinate measuring system.As a result,the measurement uncertainty is reduced from 1.2μm to 0.2μm within the dynamic measurement range of 1.0 m.The MCLI is adept at integrate and flexible installation,which caters to various applications on precision measurement.

关 键 词：INTERFEROMETER CHANNEL POLARIZATION 

分 类 号：TN249[电子电信—物理电子学]