柔性光纤压力传感器的制备工艺与参数研究  

Research on Preparation Technology and Parameters of Flexible Optical Fiber Pressure Sensor

作　　者：林雅坤 洪明森 隋丹丹 洪应平[1] 张会新[1] LIN Yakun;HONG Mingsen;SUI Dandan;HONG Yingping;ZHANG Huixin(Key Laboratory of Instrument Science and Dynamic Testing qf the Ministry of Education,North University of China,Taiyuan Shanxi 030051,China)

机构地区：[1]中北大学,仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《电子器件》2022年第5期1061-1065,共5页Chinese Journal of Electron Devices

摘　　要：为了提高柔性光纤压力传感器的灵敏度和稳定性,对压力传感器结构设计、结构参数及制作工艺进行了研究。制作了基于不同浓度配比和不同固化时间的PDMS柔性光纤压力传感器,对比了不同参数下传感器的性能,得出了最佳的配比和固化参数,最后利用光频域反射计(OFDR)测量了光纤应变变化。结果表明,在PDMS基底厚度和固化温度恒定的情况下,浓度配比和固化时间均对柔性光纤压力传感器的灵敏度有影响,并验证了当施加压力的范围为0~276.2 kPa,加压的步长为27.6 kPa时,PDMS配比为8∶1,固化时间为2 h的传感器灵敏度最高,可达6.250 59με/kPa。同时,柔性压力传感器具有柔韧、轻薄、可测量复杂曲面等优点,为航天航海领域弧形物体表面压力测量提供了可靠的解决方案。In order to improve the sensitivity and stability of the flexible optical fiber pressure sensor, the structural design and relevant parameters and the fabrication process of the pressure sensor are studied. Flexible optical fiber pressure sensors based on different concentration ratio and different curing time of PDMS are fabricated. The performance of the sensors under different parameters is compared to get the best parameters of concentration ratio and curing time. Finally, the fiber strain change is measured by using optical frequency domain reflectometer(OFDR). The results show that the sensitivity of the flexible optical fiber pressure sensor is influenced by the concentration ratio and curing time when the conditions of PDMS substrate thickness and curing temperature is fixed. The sensitivity of the sensor with the PDMS ratio of 8∶1 and curing time of 2 h is the highest, which can reach 6.250 59 με/kPa, when the range of pressuring is 0~276.2 kPa and the step size of pressurizing is 27.6 kPa. At the same time, the flexible pressure sensor has the advantages of flexibility, lightness and thinness, and can measure complex curved surfaces, which provides a reliable solution for measuring the surface pressure of curved objects in the field of aerospace and navigation.

关 键 词：PDMS 光纤压力传感器 灵敏度 光频域反射计 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]