基于半圆柱增敏结构的柔性光纤压力传感器设计  

Design of Flexible Optical Fiber Pressure Sensor Based on Semi-Cylinder Pressure Sensitivity Enhancement Structure

作　　者：刘宏艺 李晨[1,2] 张会新[1,2] 王星来 隋丹丹 LIU Hongyi;LI Chen;ZHANG Huixin;WANG Xinglai;SUI Dandan(National Key Laboratory of Electronic Measurement Technology,North University of China,Taiyuan Shanxi 030051,China;Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China,Taiyuan Shanxi 030051,China;Beijing Institute of Astronautical Systems Engineering,Beijing 100000,China)

机构地区：[1]中北大学,电子测试技术国家重点实验室,山西太原030051 [2]中北大学,仪器科学与动态测试教育部重点实验室,山西太原030051 [3]北京宇航系统工程研究所,北京100000

出　　处：《电子器件》2022年第5期1066-1070,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金杰出青年基金(61525107)。

摘　　要：为了进一步增强光纤压力传感器的灵敏度,提出了一种基于半圆柱结构设计的柔性光纤压力传感器。此结构使用聚二甲硅氧烷(PDMS)作为该传感器柔性基底,传感器外部受力时,首先PDMS发生形变,从而使得光纤发生形变,最终光纤发生轴向拉伸。利用光频域反射计(OFDR)测量光纤的轴向应变,对所提出的增敏结构传感器进行ABAQUS有限元仿真分析和实验验证。结果表明,该半圆柱增敏结构可以有效提高传感器的灵敏度。在0~160 kPa的测压范围内,仿真得到的传感器的灵敏度为2.160 39με/kPa,实验测得传感器的灵敏度能够达到2.068 06με/kPa。In order to enhance the sensitivity of optical fiber pressure sensor, a flexible optical fiber pressure sensor based on semi-cylinder structure is proposed. Polydimethylsiloxane(PDMS)is used as the flexible substrate of the sensor. When external force is exerted, the PDMS will be deformed first, which will cause the optical fiber to be deformed accordingly, and finally the optical fiber will be stretched axially. Optical frequency domain reflectometer(OFDR)is used to measure the axial strain of the fiber, and finite element simulation analysis using ABAQUS and experimental verification of the proposed sensitization structure sensor are carried out. The results show that the sensitivity of the sensor can be improved effectively by taking the structure of semi-cylinder. In the pressure measuring range of 0~160 kPa, the sensitivity of the simulated sensor is 2.160 39 με/kPa, and the sensitivity of the experimental sensor can reach 2.068 06 με/kPa.

关 键 词：光纤压力传感器 聚二甲基硅氧烷(PDMS) 灵敏度 Abaqus仿真 光频域反射计(OFDR) 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]