照明方式对微型圆柱直径测量的影响  

Influence of Lighting Methods on the Measured Diameter of Micro-cylinder

作　　者：叶成钢[1] 胡勇 王琦[1] 马小军[1] YE Chenggang;HU Yong;WANG Qi;MA Xiaojun

机构地区：[1]中国工程物理研究院激光聚变研究中心

出　　处：《计量与测试技术》2022年第10期55-56,63,共3页Metrology & Measurement Technique

摘　　要：在靶参数检验过程中,发现应用测量显微镜测量黑腔、芯轴等圆柱形零件的直径时,其测量值始终偏小。因此,本文通过理论分析和实验验证,明确了问题产生的原因,即不平行光照明造成底光照明模式下圆柱直径测量值偏小,提出了采用平行光照明方式解决该问题的技术方案,并开展了相应的测试验证。结果表明,本文所建议的测量方案使微型圆柱直径测量误差大为降低,其测量误差约1μm。In the process of target parameter test, it is found that the measurement value is always too small when measuring the diameter of cylindrical parts such as hohlraum and mandril by using measurement microscope.To solve this problem, through theoretical analysis and experimental verification, it is clear that the reason for the small measured value of cylinder diameter is that the light sources in the bottom illumination mode are not parallel.In view of the above problems, this paper puts forward a technical scheme to solve this problem by using parallel light illumination, and carries out corresponding test verification.The results show that the measurement error of micro-cylinder diameter is greatly reduced by the proposed measurement scheme, and the measurement error is about 1 μm.

关 键 词：微型圆柱 照明方式 直径测量 平行照明 

分 类 号：TB921[一般工业技术—计量学]