低真空测量光学谐振腔的设计与分析  

Design and Analysis of Optical Resonator Cavity for Low Vacuum Measurement

作　　者：黄新宇 余清洲 杨庆喜[1] 陈肇玺 王进[2] 王新广 陈仕琳 HUANG Xinyu;YU Qingzhou;YANG Qingxi;CHEN Zhaoxi;WANG Jin;WANG Xinguang;CHEN Shilin(Institute of Plasma Physics,Hefei Institutes of Physical Science,Chinese Academy of Science,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China)

机构地区：[1]中国科学院合肥物质科学研究院等离子体物理研究所,合肥230031 [2]中国科学技术大学,合肥230026

出　　处：《真空科学与技术学报》2022年第10期737-744,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点研发计划项目(Y15HX11706)。

摘　　要：基于磁约束核聚变运行真空测量需求和强磁场高辐照运行环境要求,本文设计了一种光学真空测量手段,介绍了该方法的原理,结合理论计算与有限元仿真,模拟分析了温度、气压和振动等主要因素对光学谐振腔测量不确定度的影响,并提出优化方案,验证了光学谐振腔应用于聚变环境测量的可行性。本研究为光学谐振腔的工程化设计提供了理论指导与依据,也为优化提高测量装置精确度提供了可行性方案。Based on the high vacuum measurement requirements of magnetic confinement fusion operation and the environmental requirements of strong magnetic field irradiation,an optical vacuum measurement method is designed,and the principle of the method is introduced.Combined with theoretical calculation and finite element simulation,the influence of main factors such as temperature,pressure,and vibration on the measurement uncertainty of the optical cavity is simulated and analyzed,and the optimization scheme is proposed.The feasibility of the optical cavity applied to fusion environment measurement is verified.This study provides theoretical guidance and basis for the engineering design of optical resonator and provides a feasible scheme for optimizing and improving the accuracy of measuring devices.

关 键 词：聚变堆 真空测量 气体压力 光学谐振腔 

分 类 号：TB7[一般工业技术—真空技术]