样品辐照电子源的研发  

The Development of Sample Irradiated Electron Source

作　　者：石晓倩 陈雪颖 郭方准[1] SHI Xiaoqian;CHEN Xueying;GUO Fangzhun(School of Mechanical Engineering,Dalian Jiaotong University,Dalian 116028,China)

机构地区：[1]大连交通大学机械工程学院,大连116028

出　　处：《真空科学与技术学报》2022年第10期769-773,共5页Chinese Journal of Vacuum Science and Technology

基　　金：辽宁省教育厅“攀登学者”项目。

摘　　要：为了研究地球早期环境和生命演化过程,设计制作了样品辐照电子源。电子通过热灯丝发射,能量通过阴极电压来调节,电子束斑尺寸通过静电透镜来调节。灯丝缠绕方式提高了发射电子的均匀性。根据理论分析和电磁软件仿真,确定了电子源阴极与控制极距离的参数。仿真结果显示,在能量为3.5 keV时聚焦电压越大束斑越小,在工作距离为150 mm时束斑直径可实现30-50 mm之间可调。实验结果显示,该装置发射的电子束能量在1-5 keV之间连续可调;在工作距离为150 mm时,3.5 keV电子束的束斑直径可调,与仿真结果变化趋势一致,可产生20.8μA电子束流。A sample irradiation electron source is developed to study the early earth environment and life evolution process.The electrons are emitted by the hot filament,the electron energy is determined by the cathode voltage,and the electron beam spot size is determined by an electrostatic lens.The filament winding method increases the uniformity of electron emission.According to theoretical analysis and electromagnetic software simulation,the parameters of the distance between the cathode and the control pole are determined.The simulation results show that when the energy is 3.5 keV,the larger the focusing voltage,the smaller the beam spot.When the working distance is 150 mm,the beam spot diameter can be adjusted from 30 to 50 mm.The experimental results show that the energy of the electron beam emitted by the device is continuously adjustable between 1 and 5 keV.When the working distance is 150 mm,the spot diameter of the 3.5 keV electron beam can be adjusted,which is consistent with the simulation results and can produce a 20.8μA electron beam.

关 键 词：电子枪 静电透镜 环境模拟 电子轨迹 

分 类 号：TN16[电子电信—物理电子学]