Optical properties of He^(+)-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides  

作　　者：Jia-Li You Yu-Song Wang Tong Wang Li-Li Fu Qing-Yang Yue Xiang-Fu Wang Rui-Lin Zheng Chun-Xiao Liu 游佳丽;王雨松;王彤;付丽丽;岳庆炀;王祥夫;郑锐林;刘春晓(College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China;Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan 250014,China;Jiangsu Province Engineering Research Center for Fabrication and Application of Special Optical Fiber Materials and Devices,Nanjing 210023,China)

机构地区：[1]College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China [2]Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device,School of Physics and Electronics,Shandong Normal University,Jinan 250014,China [3]Jiangsu Province Engineering Research Center for Fabrication and Application of Special Optical Fiber Materials and Devices,Nanjing 210023,China

出　　处：《Chinese Physics B》2022年第11期324-328,共5页中国物理B（英文版）

基　　金：Project supported by the Postgraduate Research and Practice Innovation Program of Jiangsu Province,China(Grant No.SJCX210274);the National Natural Science Foundation of China(Grant Nos.11405041 and 61905119);the Scientific Research Foundation for Youths Supported by Jiangxi Province Science Foundation,China(Grant No.20192BAB217015);the University Natural Science Research Project of Jiangsu Province,China(Grant No.19KJB140013)。

摘　　要：Terbium gallium garnet(Tb_(3)Ga_(5)O_(12),TGG)crystal can be used to fabricate various magneto-optical devices due to its optimal Faraday effect.In this work,400-keV He^(+)ions with a fluence of 6.0×10^(16)ions/cm^(2)are irradiated into the TGG crystal for the planar waveguide formation.The precise diamond blade dicing with a rotation speed of 2×10^(4)rpm and a cutting velocity of 0.1 mm/s is performed on the He^(+)-implanted TGG planar waveguide for the ridge structure.The darkmode spectrum of the He^(+)-implanted TGG planar waveguide is measured by the prism-coupling method,thereby obtaining the relationship between the reflected light intensity and the effective refractive index.The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method.The near-field light intensity distribution of the planar waveguide and the ridge waveguide are recorded by the end-face coupling method.The He^(+)-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.

关 键 词：TGG crystal optical waveguide ion implantation precise diamond blade dicing 

分 类 号：O786[理学—晶体学] TN252[电子电信—物理电子学]