适用于针尖增强拉曼的银针尖物理制备方法研究  

Physical Preparation Methods of Ag Tips for Tip-Enhanced Raman Spectroscopy

作　　者：祝敏豪 高思田[2] 黄鹭[2] 胡佳成 孙晓爽 刘林伟 ZHU Min-hao;GAO Si-tian;HUANG Lu;HU Jia-cheng;SUN Xiao-shuang;LIU Lin-wei(Collage of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2022年第11期1398-1403,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0200602;2016YFA0200901)。

摘　　要：提出两种可适用于针尖增强拉曼光谱(TERS)系统的拉曼针尖及其物理制备方法,制备针尖分别为银与镀银针尖。基于时域有限差分法(FDTD)仿真,对4种不同中间层材料、无中间层材料的不同膜厚镀银针尖及不同针尖曲率的银针尖进行仿真研究,并对入射光与针尖夹角,针尖与样品间距对电磁场增强的影响进行了探究。结果显示:以钛、铜为中间层膜厚为45 nm的镀银针尖以及针尖曲率为55 nm的银针尖具有最佳的电磁场增强效果。入射光与针尖夹角为39.27°,针尖与样品间距小于1 nm时具有最佳的电磁场增强效果。基于仿真,采用磁控溅射成功制备以钛为中间层的镀银针尖,聚焦离子束(FIB)切割成功制备出银针尖。Two Raman tips and their physical preparation methods that can be applied to the tip enhanced Raman spectroscopy(TERS)system are proposed,namely Ag and Ag-plated tips.Based on finite difference time domain(FDTD)simulation,without interlayer and four different interlayer materials,a simulation study of Ag-plated tips with different film thicknesses and Ag tip points with different tips point curvatures is carried out.The influence of the angle between the incident ray and the tip of the tip and the distance between the tip and the sample on the enhancement of the electromagnetic field is explored.The results show that the Ag-plated tip with a thickness of 45 nm with titanium and copper as the intermediate layer and the Ag tip with a tip curvature of 55 nm have the best electromagnetic field enhancement effect.The angle between the incident light and the tip is 39.27°,and the distance between the tip and the sample is less than 1 nm,which has the best electromagnetic field enhancement effect.Based on simulation,magnetron sputtering is used to successfully prepare Ag-plated tips with titanium as the intermediate layer,and focused ion beam(FIB)cutting to successfully prepare Ag tips.

关 键 词：计量学 拉曼针尖 时域有限差分法 银针尖 聚焦离子束 物理制备法 

分 类 号：TB92[一般工业技术—计量学]