高纯电子混合气的制备  

Preparation of High-purity Electronic Mixture

作　　者：闫云 李旭 王星帅 王坤 YAN Yun;LI Xu;WANG Xingshuai;WANG Kun(Handan Peric Special Gas Co.,Ltd.of CSIC,Handan 057550,China)

机构地区：[1]中船(邯郸)派瑞特种气体股份有限公司,河北邯郸057550

出　　处：《低温与特气》2022年第5期19-21,共3页Low Temperature and Specialty Gases

摘　　要：总结了高纯电子混合气在质量和制备技术方面的最新进展。由于气体纯化和充装技术的进步,使混合气纯度更高,浓度相对偏差要求更低。在制备方面,自动化和批量化在重量法、压力法和质量流量比法等配气方法上的应用都有较大进展。The latest progress in quality and preparation technology of high-purity electronic mixture is summarized.Due to the progress of gas purification and filling technology,the purity of mixed gas is higher and the relative deviation of concentration is lower.In terms of preparation,automation and batch have made great progress in the application of gas preparation methods such as gravimetric method,pressure method and mass flow ratio method.

关 键 词：混合气 制备 自动 批量 

分 类 号：TQ117[化学工程—无机化工]