电子级二氟甲烷的纯化研制  

Purification of Electronic Grade Difluoromethane

作　　者：陈艳珊 CHEN Yanshan(Guangdong Huate Gas Co.,Ltd.,Foshan 528241,China)

机构地区：[1]广东华特气体股份有限公司,广东佛山528241

出　　处：《低温与特气》2022年第5期43-45,共3页Low Temperature and Specialty Gases

摘　　要：对电子级二氟甲烷的用途及发展进行了简述,介绍了现有的纯化技术。针对现有技术的不足,自主研发二氟甲烷纯化技术,采用三级吸附与二级精馏相结合的方式获得5N以上的电子级产品,并实现了批量供应,产品满足半导体行业的使用要求。The application and development of electronic grade difluoromethane are reviewed,and the existing purification technology is introduced.In view of the shortage of existing technology,independently developed the purification technology of difluoromethane,using the three-stage adsorption and two-stage distillation combined way,to obtain more than 5N electronic grade products,and realize the batch supply,the products meet the requirements of the semiconductor industry.

关 键 词：电子级 纯化 吸附 精馏 

分 类 号：TQ2[化学工程—有机化工] TQ117