单晶硅探针修锐加工仿真与实验研究  

Simulation and Experimental Study on the Sharpening of Single-crystal Silicon Probes

作　　者：陈建超[1,2] 高玉东 许帅康 吴敬鑫 王加春 CHEN Jian-chao;GAO Yu-dong;XU Shuai-kang;WU Jing-xin;WANG Jia-chun(School of Mechanical Engineering,Yanshan University,Qinhuangdao 066000,China;Heavy-duty Intelligent Manufacturing Equipment Innovation Center of Hebei Province,Yanshan University,Qinhuangdao 066000,China)

机构地区：[1]燕山大学机械工程学院,秦皇岛066000 [2]燕山大学河北省重型智能制造装备技术创新中心,秦皇岛066000

出　　处：《组合机床与自动化加工技术》2022年第12期124-127,共4页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：河北自然科学基金项目(E2021203185);河北省研究生创新资助项目(CXZZSS2021056)。

摘　　要：针对磨钝后的原子力显微镜单晶硅探针低成本修锐的需求,提出了一种基于超声调控磨粒流技术的修锐加工方法。采用有限元分析方法研究了探针针尖附近声流场的分布形式,基于原子力显微镜搭建了实验装置,开展了单晶硅探针的修锐加工实验。结果表明,在针尖两侧能够形成旋向相反的涡状声流场,验证了该方法加工原理的可行性,其次在数分钟加工时间内在针尖尖端产生了明显的加工去除痕迹;加工后的探针针尖圆弧半径与针尖侧角显著减小。A sharpening method based on ultrasonic manipulation abrasive flow technology was proposed to fulfill the need for low-cost sharpening of blunt AFM single crystal silicon probes.The distribution pattern of the acoustic flow field near the probe tip was studied by the finite element analysis method,An experimental setup was built based on the atomic force microscope,and the processing and sharpening experiments of the single crystal silicon probe were carried out.The results show that a vortex flow field with opposite handedness could be formed on both sides of the tip,which verifies the feasibility of the processing principle of this method.for another visible material removal at the tip of the probe is found after minutes of machining time,and the tip radius and the side angle of the probe tip are significantly reduced.

关 键 词：超声 磨粒流 单晶硅探针 声流场 

分 类 号：TH165[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]