Ti/AlN/Ti/AlN多层涂层的制备和阻氘性能  

Preparation and Deuterium Permeation Properties of Ti/AlN/Ti/AlN Multiple Coatings

作　　者：张高伟[1] 韩文妥[1] 张磊[1] 易晓鸥 刘平平[1] 詹倩[1] 万发荣[1] Zhang Gaowei;Han Wentuo;Zhang Lei;Yi Xiaoou;Liu Pingping;Zhan Qian;Wan Farong(School of Materials Science and Engineering,University of Science and Technology Beijing,Beijing 100083,China)

机构地区：[1]北京科技大学材料科学与工程学院,北京100083

出　　处：《稀有金属材料与工程》2022年第10期3943-3948,共6页Rare Metal Materials and Engineering

基　　金：国家重点研发计划专项(2017YFE0301400);北京市自然科学基金(2182043)。

摘　　要：为提高AlN涂层的稳定性和阻氚性能,提出“Ti-AlN”结构涂层。采用磁控溅射法在316L不锈钢基体表面制备了结构致密、总厚度约500 nm的Ti/AlN/Ti/AlN多层涂层。对该涂层样品进行不同的真空热处理后,采用SEM、XRD、AES等手段分析涂层样品在热处理前后的微观形貌和结构变化,并对涂层样品在200~600℃的阻氘性能进行测试和分析。结果表明,仅热处理温度为760℃时,Ti-AlN界面反应生成少量的Al_(3)Ti相。在所有涂层样品中,热处理温度为700℃、升温速率为1.5℃/min的涂层表现出最优的阻氘性能,其600℃的PRF(permeation reduction factor)高达536。当热处理温度升高至760℃或升温速率达到2.5℃/min时,表层AlN层的开裂程度更为严重,并导致涂层的阻氘性能显著降低。另外,所有涂层样品的PRF均随渗透温度的降低而急剧减小,表明氘气渗透过程中的温度变化会引起该多层涂层阻氘性能的失效。To improve the stability and tritium permeation resistance of the AlN single-layer coating,a Ti-AlN system coating was proposed.Ti/AlN/Ti/AlN multiple coatings with dense structure and total thickness of about 500 nm were prepared on the substrate surfaces of 316L stainless steel by magnetron sputtering.The coated samples were heat-treated under different conditions,and the microstructure and phase composition before and after heat treatment were analyzed by SEM,XRD and AES.The deuterium permeation experiments at 200~600°C were then conducted for all the samples.The results show that only some amount of Al3Ti products are formed at the Ti-AlN interface for all the coated samples heated at 760°C for 4 h.Among all the coated samples,the coated sample with heat-treated temperature of 700°C and heating rate of 1.5°C/min exhibits the best deuterium permeation resistance,and its PRF(permeation reduction factor)value at 600°C is 536.When the heat-treated temperature is increased to 760°C or the heating rate is increased to 2.5°C/min,the cracking of the coating will be obviously aggravated,which lowers the deuterium permeation resistance.On the other hand,with the decrease of the penetration temperature,the PRF values of all the coated samples also decrease sharply,indicating that the temperature change during the deuterium penetration process would cause the failure of the deuterium barrier properties of the multiple coating.

关 键 词：聚变堆 氚渗透 Ti/AlN/Ti/AlN多层涂层 阻氘性能 

分 类 号：TG178.1[金属学及工艺—金属表面处理]