缓存区工位和调度系统在CMP设备中的应用  

Application of Buffer Station and Scheduling System in CMP Equipment

作　　者：田洪涛[1] 王嘉琪 刘志伟 吴燕林 TIAN Hongtao;WANG Jiaqi;LIU Zhiwei;WU Yanlin(The 45th Reserch Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2022年第5期53-55,共3页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种半导体专用设备用的缓存装置及其调度方法,此调度方法适用于晶圆的多种工艺加工过程,针对设备在晶圆传输过程中遇到模块故障或者模块超时问题,合理的启用缓存区工位将有受损风险的晶圆收纳到缓存区,并在故障消除后将晶圆恢复至正常工艺流程的方法。该系统方法最大限度地保护晶圆的安全,同时也为快速恢复正常加工提供了保障。This paper mainly introduces a kind of cache device for special semiconductor equipment and its scheduling method.This scheduling method is applicable to a variety of wafer processing processes.In view of the problems such as module failure or module timeout encountered by the equipment in wafer transmission process,it is reasonable to enable the cache station to store the wafer with damage risk into the cache area,and the method of restoring the wafer to the normal process flow after the fault is eliminated.The system method not only protects the safety of the wafer to the greatest extent,it also provides guarantee for rapid recovery of normal processing.

关 键 词：化学机械平坦化(CMP)设备 缓存区 调度流程 

分 类 号：TN305[电子电信—物理电子学]