金属基原位生成薄膜应力传感器及其性能研究  

Metal-Based In-Situ Generation of a Thin-Film Stress Sensor and its Properties

作　　者：胡林 邹洪森 高纬栋 陈国伟 孙秉毅 刁心玺 HU Lin;ZOU Hongsen;GAO Weidong;CHEN Guowei;SUN Bingyi;DIAO Xinxi(Wins Wireless Network Technology Ltd.,Jiaxing 314001,China;State Grid Ningxia Electric Power Co.,Ltd.,Maintenance Company,Yinchuan 750001,China)

机构地区：[1]浙江维思无线网络技术有限公司,浙江嘉兴314001 [2]国网宁夏电力有限公司检修公司,宁夏银川750001

出　　处：《传感器世界》2022年第10期15-19,35,共6页Sensor World

摘　　要：针对传统“贴片”箔式传感器粘胶传递形变滞后、敏感栅和基底协同形变不佳以及粘胶易老化蠕变等问题,研制了一种金属基原位生成的薄膜应力传感器。该传感器通过在金属结构钢表面逐步原位沉积NiCrAlY合金过渡层、AlO绝缘层、康铜薄膜电阻栅网以及环氧灌封胶保护层等功能层制备而成。实验结果表明,原位生成的薄膜应力传感器(GF=11.94)相比于“贴片”箔式传感器(GF=7.29)具有更高的灵敏度,敏感栅和基底的协同形变效果更好,传感器的蠕变更小,使用长期稳定性也更好。An in-situ generated thin-film stress sensor is designed and developed on the metal substrate.The film sensor overcomes the shortcomings in the commonly used foil sensor prepared through “patch” technology,such as hysteresis effect and an inferior synergistic deformation between the sensitive grid and the substrate.In addition,the glue layer is prone to aging and creep.The film sensor is prepared by an in-situ sequential deposition of the transition layer(NiCrAlY alloy),insulating layer(AlO),thin-film grid(Constantan) and protective layer(Epoxy) on the surface of an alloy steel substrate.Further study indicates that the in-situ generated thin film stress sensor(GF=11.94) delivers higher sensitivity than the “patched” foil sensor(GF=7.29).The sensitive grid is more likely to co-deform with the substrate.Moreover,the creep is smaller and the sensor exhibits long-term stability owning to the avoidable use of glue layer in the structure.

关 键 词：薄膜传感器 原位沉积 多层膜结构 箔式传感器 应变敏感系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]