扫描电镜纳米分辨高温力学原位仪器研制进展  

Development of in-situ SEM instrument with nano resolution for mechanical property testing at high temperature

作　　者：王晋 马晋遥 唐亮 张跃飞 张泽[1] WANG Jin;MA Jin-yao;TANG Liang;ZHANG Yue-fei;ZHANG Ze(School of Materials Science and Engineering,Zhejiang University,Hangzhou Zhejiang 310027,China)

机构地区：[1]浙江大学材料科学与工程学院,浙江杭州310027

出　　处：《电子显微学报》2022年第6期645-653,共9页Journal of Chinese Electron Microscopy Society

基　　金：国家科技重大专项(No.J2019-III-0008-0051);国家自然科学基金基础科学中心项目(No.51988101)。

摘　　要：高温(1 000℃以上)高应力环境是金属、陶瓷等材料在热处理、烧结和制备过程中的主要工艺条件,也是航空发动机、核电站和火电站等关键热端部件服役过程中的苛刻工况条件之一。基于扫描电子显微镜的纳米分辨原位高温力学性能测试仪器能够从纳米到宏观尺度全面、深入、准确地研究材料在高温应力条件下微观组织结构、元素成分以及晶体取向演变与材料力学性能变化之间的定量化关系,是优化材料制备工艺、质量检测、服役寿命评估、安全性评价等的重要科学技术手段。本文主要介绍近年来浙江大学张泽院士主持的国家自然科学基金委重大科研仪器设备研制专项《针对若干国家战略需求材料使役条件下性能与显微结构间关系的原位研究系统》的重要研究成果以及扫描电镜纳米分辨高温力学原位仪器研制的最新研究进展和在材料科学研究中的应用。High temperature(above 1 000 ℃) and stress are the main parameters for heat treatment,sintering,and preparation of metals,ceramics and other materials.They are also the harsh working conditions for key hot components such as aero-engines,nuclear power plants,and thermal power plants.In-situ high-temperature mechanical testing instrument with nano-resolution based on scanning electron microscope can accurately study the relationship between the microstructure,elemental composition,crystal orientation evolution and the mechanical properties of materials under the condition of high temperature and stress.This new scientific instrument is an important technique to optimize material preparation process,quality inspection,service life evaluation,and safety evaluation.This work mainly presents the important result of the major scientific research instrument and equipment development project of NSFC chaired by academician Zhang Ze of Zhejiang University in recent years.Besides,we also present the latest research progress in the development of SEM in situ nano-resolution of high temperature mechanical instrument and their applications in materials science research.

关 键 词：原位高温拉伸台 高温力学 材料微观结构 扫描电子显微镜 高温成像 

分 类 号：TG131[一般工业技术—材料科学与工程] TG115.21[金属学及工艺—合金] TH871[金属学及工艺—金属学]