极小流导分子流真空流导元件研究进展  

Research Progress of the Molecular Flow-Vacuum Conductance Elementwith Ultra-Small Flow Conductance

作　　者：林文豫 王旭迪[1] LIN Wenyu;WANG Xudi(Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学,合肥230009

出　　处：《真空与低温》2022年第6期720-732,共13页Vacuum and Cryogenics

基　　金：国家自然科学基金面上项目(61871172)。

摘　　要：作为真空计量关键器件,真空流导元件在真空检漏及相关测量领域中发挥着重要的作用。在众多类型的流导元件中,分子流流导元件因其流导特性受到广泛的关注。概述了几种极小流导分子流真空流导元件的研究进展,包括阳极氧化多孔氧化铝、硅基微纳通道以及石墨烯分子流流导元件,介绍了它们的制作工艺及流导测试结果,各种极小流导真空流导元件的分子流压力上限均为105 Pa量级。极小流导的分子流真空流导元件可应用于非蒸散型吸气剂性能测试、真空泵抽速测试、真空室体积及密闭容器漏率测量。As a key device for vacuum metrology,the vacuum conductance element plays an important role in the field of vacuum leakage detection and related measurements.Among the various types of conductance elements,molecular flow-conductance elements have attracted wide attention due to their conductance characteristics.This paper provides a brief overview of several molecular flow-vacuum conductance elements that can obtain ultra-small flow conductance.The content includes anodic aluminum oxide,silicon-based micro-nano channels,and graphene molecular flow-conductance elements.The production process and conductance test results are presented.The upper limit of molecular flow pressure of these molecular flow-vacuum conductance elements is 105 Pa.This type of molecular flow-vacuum conductance element with ultra-small conductance can be used in non-evaporable getter performance evaluation,vacuum pump pumping speed testing,vacuum chamber volume determination and leak rate measurement of closed containers.

关 键 词：真空流导元件 分子流 阳极氧化多孔氧化铝 微纳通道 石墨烯 

分 类 号：TB774.3[一般工业技术—真空技术]