金属波纹管氦质谱检漏方法探究  

Study on Leak Detection Method of Metal Bellows by Helium Mass Spectrometry

作　　者：张博 宋林红[1] 钱江[1] 张文良[1] 张全厚 曹月秋 ZHANG Bo;SONG Lin-hong;QIAN Jiang;ZHANG Wen-liang;ZHANG Quan-hou;CAO Yue-qiu(Shenyang Academy of Instrumentation Sciences Co.,Ltd.,Shenyang 110000,Liaoning,China;Anshan Solenoid Valve Co.,Ltd.,Anshan 114300,Liaoning,China)

机构地区：[1]沈阳仪表科学研究院有限公司,辽宁沈阳110000 [2]鞍山电磁阀有限责任公司,辽宁鞍山114300

出　　处：《阀门》2022年第6期478-480,共3页VALVE MAGAZINE

摘　　要：简要介绍了氦质谱检漏仪的工作原理以及不同类型的金属波纹管。在氦质谱检漏时,针对不同波纹管的特点,探究了单层薄壁波纹管、多层金属波纹管、大直径金属波纹管等的特定检测方法。The working principle of helium mass spectrometry leak detector and different types of metal bellows are briefly introduced.According to the characteristics of different bellows,specific detection methods of single-layer,thin-wall bellows,multi-layer metal bellows and large-diameter metal bellows are explored in helium mass spectrometry.

关 键 词：氦质谱检漏仪 金属波纹管 试验工装 

分 类 号：TH703.2[机械工程—仪器科学与技术]