千单元自适应压电变形镜的高压放大器设计  

Design of high voltage amplifier for thousand-element adaptive piezoelectric deformable mirror

作　　者：邵蒙 李洪文[1] 姚凯男[1] 杨乐强 邓永停[1] SHAO Meng;LI Hongwen;YAO Kainan;Yang Leqiang;DENG Yongting(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《光学精密工程》2022年第23期2995-3003,共9页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.11973041,No.12122304);中国科学院青年创新促进会会员项目(No.2019218)。

摘　　要：为了满足大型地基望远镜高分辨率成像的需求,需要利用自适应光学技术对大气湍流造成的波前误差进行校正。压电变形镜是自适应光学系统的关键部件,针对大型地基高分辨率成像望远镜中千单元级压电变形镜的高压高速驱动问题,设计了高性能压电陶瓷高压放大器。该高压放大器采用基于高速低压运算放大器和分立功率器件构成两级放大结构,实现压电陶瓷的高精度大功率驱动。相比于集成运放器件构成的驱动系统,该高压放大器具有驱动能力更强、成本更低的优势,适用于驱动通道较多的自适应压电变形镜系统。实验结果表明:本文设计的高压放大器可以实现120 V输出,驱动0.33μF容性负载时-3 dB带宽达到5000 Hz,输出响应时间≤100μs。该高压放大器能够满足千单元级压电变形镜的应用要求。In order to meet the high-resolution imaging requirements of large ground-based telescopes,adaptive optics technology needs to be used to correct the wavefront error caused by atmospheric turbu⁃lence.The piezoelectric deformable mirror is the key component of an adaptive optics system.Aiming at the high-voltage and high-speed driving of the thousand-element piezoelectric deformable mirror in a large ground-based high-resolution imaging telescope,a high-performance piezoelectric ceramic high-voltage am⁃plifier was designed.The high-voltage amplifier adopts a two-stage amplification structure based on high-speed low-voltage operational amplifiers and discrete power devices to realize high-precision and high-pow⁃er driving of piezoelectric ceramics.Compared with a driving system composed of integrated operational amplifier devices,the high-voltage amplifier has the advantages of a stronger driving capability and lower cost,and it is more suitable for piezoelectric deformable mirror systems with many driving channels.The experimental results show that the high-voltage amplifier designed in this paper can achieve a 120 V out⁃put,the-3 dB bandwidth can reach 5000 Hz when driving a 0.33μF capacitive load,and the output re⁃sponse rise time is less than or equal to 100μs.The high-voltage amplifier can meet the application re⁃quirements of a thousand-element piezoelectric deformable mirror.

关 键 词：自适应光学 望远镜 压电变形镜 压电陶瓷 高压放大器 

分 类 号：TH743[机械工程—光学工程] TM133[机械工程—仪器科学与技术]