超导量子芯片集成技术概述  

Review on superconducting quantum chip integration technologies

作　　者：郑伟文 李晓伟 熊康林 冯加贵[2,3] ZHENG Weiwen;LI Xiaowei;XIONG Kanglin;FENG Jiagui(Yangtze River Delta Industrial Innovation Center for Quantum Science and Technology,Suzhou 215123,Jiangsu Province,China;GUSU Laboratory of Materials,Suzhou 215123,Jiangsu Province,China;Vacuum Interconnected Nanotech Workstation,Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences,Suzhou 215123,Jiangsu Province,China)

机构地区：[1]量子科技长三角产业创新中心,江苏苏州215123 [2]材料科学姑苏实验室,江苏苏州215123 [3]中国科学院苏州纳米技术与纳米仿生研究所纳米真空互联实验站,江苏苏州215123

出　　处：《电子元件与材料》2022年第11期1143-1148,共6页Electronic Components And Materials

基　　金：中国科学院青年创新促进会项目(2019319)。

摘　　要：超导量子与传统半导体技术兼容性好,具有微纳制造工艺成熟、系统集成度高、可扩展性好等优点,是最有可能实现通用量子计算的方案之一。经过近几十年的快速发展,超导量子在退相干时间、门保真度、比特规模化集成等方面都取得了很大的进展。然而要实现超导量子计算机的商业化应用,比特数量至少需要突破1000量级,而要实现通用量子计算则需要百万量级。因此,量子比特的大规模集成技术将成为未来10年内的重点发展方向之一。文章基于传统半导体封装技术的发展历程以及世界前沿的超导量子封装集成技术路线,对超导量子比特从10量级到1000量级,再到通用化量子计算集成技术进行阐述和分析。Superconducting qubit modality is one of the most promising approaches to build a quantum computer for its compatibility with classical semiconductor technologies,high system integrability and extensibility.In recent decades,superconducting quantum has made great improvements in coherence time,gate fidelity,scale integration and so on.While the superconducting qubits should be over 1000 for the quantum system for commercial application,and millions for universal quantum computing.Therefore,the qubits large-scale integration will play an important role in the next decade.Following the developing route of classical semiconductor packaging and the world′s leading 3D integration in quantum processing systems,this paper expounds and analyzes the integration technologies for superconducting qubits from 10 to 1000 and even to the universal quantum computing.

关 键 词：超导 封装集成技术 综述 量子比特 半导体 

分 类 号：TN305[电子电信—物理电子学]