基于二硫化钼纳米片的高性能湿度传感器  

High-performance humidity sensors based on molybdenum disulfide nanosheets

作　　者：王浩 塔力哈尔·夏依木拉提 徐晓洁 吐尔迪·吾买尔 WANG Hao;TALGAR Shaymurat;XU Xiaojie;TUERDI Wumaier(Xinjiang Condensed Matter Phase Transition and Microstructure Laboratory,College of Physics Science and Technology,Yili Normal University,Yining 835000,Xinjiang Uygur Autonomous Region,China;Key Laboratory of New Energy Materials Research,Autonomous Region Education Department,Xinjiang Institute of Technology,Urumqi 830000,China)

机构地区：[1]伊犁师范大学物理科学与技术学院新疆凝聚态相变与微结构实验室,新疆伊宁835000 [2]新疆工程学院自治区教育厅新能源材料研究重点实验室,新疆乌鲁木齐830000

出　　处：《电子元件与材料》2022年第11期1158-1164,共7页Electronic Components And Materials

基　　金：国家自然科学基金(62061046);自治区教育厅高校科研计划项目(XJEDU2019Y058)。

摘　　要：采用研磨辅助液相剥离法结合高功率超声处理,制备了分散性良好、尺寸均匀的MoS_2纳米片。通过XRD、SEM以及拉曼光谱对材料进行了表征,并通过滴注法构筑基于MoS_2纳米片的电阻式湿度传感器。湿敏测试结果表明:该器件在11%RH~98%RH的检测范围内具有良好的线性、快速响应特性;在11%RH时的灵敏度为0.64,响应时间为17 s,恢复时间为2 s。除此之外,器件具有良好的重复性和长期稳定性。这些研究结果进一步拓展了MoS_2纳米片在高性能湿度传感器中的应用前景。MoS2 nanosheets with good dispersibility and uniform size was synthesized via the grinding assisted liquid phase exfoliation method combined with high-power ultrasonic treatment.The material was characterized by XRD,SEM and Raman spectroscopy,and then a resistive humidity sensor based on MoS2 nanosheets was constructed by the drip method.The measurement results show that the device exhibits good linear and rapid response characteristics in the detection range from 11%RH to 98%RH.The sensitivity is 0.64 at 11%RH,and the response and recovery time is 17 s and 2 s,respectively.In addition,the sensor also has good repeatability and long-term stability.The research in this paper is sure to expand the application of MoS2 nanosheets in high-performance humidity sensors.

关 键 词：过渡金属二卤代物(TMDCs) 二维材料 液相剥离 纳米片 湿度传感器 响应时间 

分 类 号：TN379[电子电信—物理电子学]