抛物面镜非共焦非稳腔光束整形系统研究  

Research on Beam Shaping System of Non-Confocal Unstable Resonator with Parabolic Mirrors

作　　者：王炜 万文 何琼[1] 杨晟[1] 石金发[1] 李勇[1] Wang Wei;Wan Wen;He Qiong;Yang Sheng;Shi Jinfa;Li Yong(School of Electronic Engineering,Wuhan Vocational College of Software and Engineering,Wuhan,Hubei 430205,China)

机构地区：[1]武汉软件工程职业学院电子工程学院,湖北武汉430205

出　　处：《应用激光》2022年第7期141-146,共6页Applied Laser

基　　金：武汉市科学技术局应用基础前沿专项(2019010701011383)。

摘　　要：高功率射频板条CO_(2)激光器的谐振腔结构为离轴负支非稳波导混合腔,其输出光束为一种简单像散光束,必须使用光束整形系统后才能用于激光加工。当腔镜曲率半径在一定范围内增加时,抛物面镜非共焦腔的功率提取效率、抗失调特性均优于抛物面镜共焦腔。而由于非共焦腔输出光束的特性不同于抛物面镜共焦腔,因此外光路整形系统也需要重新进行设计。对腔镜曲率半径增加2 mm的抛物面镜非共焦腔的外光路整形系统进行了分析,确定了空间滤波器的位置,对柱面镜曲率半径进行了调整,最终获得了非稳和波导方向光束M~2因子分别为1.09和1.08的类似高斯基模输出。The off-axis negative-branch unstable resonator has been adopted in high power diffusion-cooled RF-excited slab CO_(2) laser, the output beam of this resonator is a simple astigmatic beam. The beam shaping system must be applied before it could be used for laser processing. When the mirrors radius of curvature increased within a certain range, the power extraction efficiency and the anti-misalignment of the non-confocal unstable resonator with parabolic mirrors is increased compared with the confocal one. The beam shaping system must be redesigned as a result of the propagation characteristics of the output beam for the non-confocal unstable resonator with parabolic mirrors are different from the confocal one. In this paper, the beam shaping system of non-confocal unstable resonator with parabolic mirrors is investigated when the radius of curvature of the cavity mirrors increased by 2 mm. The location of the spatial filter is determined, and the radius of curvature of the cylindrical mirror is adjusted. Finally, the mode similar to fundamental Gaussian beam is obtained whose beam propagation factors are M~2=1.09 in the unstable direction and M~2=1.08 in the waveguide direction.

关 键 词：非稳腔 光束整形 非共焦腔 光束质量 

分 类 号：TN242[电子电信—物理电子学]