真空度测量仪动态校准系统  

Development of Dynamic Calibration System for Special Vacuum Tester

作　　者：卢少波 张吉峰 韩永超 杨坤 唐榕 LU Shao-bo;ZHANG Ji-feng;HAN Yong-chao;YANG Kun;TANG Rong(Beijing Vacuum Electronic Technology Co.,Ltd.,Beijing 100015,China)

机构地区：[1]北京真空电子科技有限公司,北京100015

出　　处：《真空》2022年第6期56-59,共4页Vacuum

摘　　要：真空度测试仪可在不拆卸真空开关管的前提下,利用离子流与气体压强的比例关系来测量开关管内部的真空度。真空度测试仪在使用前,需要针对不同管型进行标定校准,本文讨论了其动态校准系统的设计和校准方法,包括磁钢工装的设计、强磁场的防护,以及特殊升降机构的设计等。校准系统由校准室、超高真空系统、磁场线圈、加热装置、升降系统和真空度测试仪等组成。该校准系统利用动态对比法,在抽气和充气动态平衡时,获得标准真空规的真空度和被测真空开关管的离子流,形成校准对比曲线,实现了快速、高精度和宽量程的校准测试。The vacuum tester can measure internal vacuum of the vacuum interrupter using the proportional relationship between ion current and pressure without disassembling it. The vacuum tester needs to be calibrated for different tube types before use. In this paper, the design of calibration system including installation of magnetic coil, shielding of strong magnetic fields, special lifting device for baking and carriage, and calibration theory are discussed. The calibration system consists of calibration chamber, ultra-high vacuum system, magnetic field coil, heating device, lifting system and vacuum tester. The basic principle of the calibration system is dynamic contrast method, with standard vacuum gauge, under the dynamic balance of pumping and charging, the data of standard vacuum gauge and ion current of the vacuum interrupter are obtained, then the calibration contrast curve is formed, which realizes the rapid, high-precision and wide-range calibration test.

关 键 词：真空开关管 真空度 真空度测试仪 动态校准 

分 类 号：TB771[一般工业技术—真空技术]