一种高精度低功耗温度传感器电路  

A High Precision and Low Power Consumption Temperature Sensor Circuit

作　　者：何希然 刘晨旭 张仁辉[2] 李泽宏[2,3] 高博[1] 马跃 龚敏[1] He Xiran;Liu Chenxu;Zhang Renhui;Li Zehong;Gao Bo;Ma Yue;Gong Min(Key Lab of Microelectronics Technology of Sichuan Province,College of Physics,Sichuan University,Chengdu610064,China;State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu611731,China;Chongqing Institute of Microelectronics Industry Technology,University of Electronic Science and Technology of China,Chongqing 400031,China)

机构地区：[1]四川大学物理学院微电子技术四川省重点实验室,成都610064 [2]电子科技大学电子薄膜与集成器件国家重点实验室,成都611731 [3]电子科技大学重庆微电子产业技术研究院,重庆400031

出　　处：《半导体技术》2022年第11期906-914,共9页Semiconductor Technology

摘　　要：基于脉冲宽度可调(PWM)信号调制技术,设计了一种温度传感器电路,并对电路整体性能进行了仿真。所设计的温度传感器电路利用带隙基准电路实现了温度采样功能,采用PWM信号调制技术,在一次测温周期中输出一定数量的脉冲信号。为了减小测温误差,电路中引入斩波技术,较低平均功耗(152μW)下将电路失调电压减小了两个数量级,提高了系统的测温精度;数据转换过程中,采用带有零极点优化技术的高阶多位量化sigma-delta信号处理技术,在低过采样率(16)条件下具有足够的信噪比(79.4 dB),功耗和精度取得了较好的折中。该电路功耗低、精度高,适于各类物联网(IoT)应用。Based on the pulse width modulation(PWM)signal modulation technology,a temperature sensor circuit was designed,and the overall performance of the circuit was simulated.The designed temperature sensor circuit realized the temperature sampling function by using the bandgap reference circuit.By using the PWM signal modulation technology,a certain number of pulse signals were output in a temperature measurement cycle.In order to reduce the temperature measurement error,the chopper technology was introduced into the circuit,and the circuit offset voltage was reduced by two orders of magnitude under the lower average power consumption(152μW),and the temperature measurement accuracy of the system was improved.During the data conversion,high-order multi-bit quantization sigma-delta signal processing technology with zero-pole optimization technology was adopted,which had sufficient signal-to-noise ratio(79.4 dB)under the condition of low oversampling rate(16),achieving a good compromise between power consumption and accuracy.This circuit has advantages of low power consumption and high precision,and is suitable for various internet of thing(IoT)applications.

关 键 词：温度传感器 斩波技术 sigma-delta信号处理 脉冲宽度可调(PWM) 高精度 

分 类 号：TN710.4[电子电信—电路与系统]