人体汗液作用下LED芯片的失效机理  

Failure Mechanism of LED Chip in Human Sweat

作　　者：金豫浙 傅春花[1] 夏炜炜 JIN Yuzhe;FU Chunhua;XIA Weiwei(Guangling College,Yangzhou University,Yangzhou 225128,China;Yangzhou Zhongke Semiconductor Lighting Co.,Ltd.,Yangzhou 225009,China)

机构地区：[1]扬州大学广陵学院,扬州225128 [2]扬州中科半导体照明有限公司,扬州225009

出　　处：《腐蚀与防护》2022年第11期106-109,118,共5页Corrosion & Protection

基　　金：扬州市自然科学基金(Y2018095);扬州大学广陵学院教学改革研究项目(JGZD20003)。

摘　　要：对含铝反射电极的半导体发光二极管LED芯片在人体汗液作用下的失效现象进行了研究。通过扫描电子显微镜(SEM)和X射线能谱仪(EDS),对失效样品不同区域的成分进行对比分析;通过模拟人体汗液污染试验,对优化电极工艺和结构后的芯片进行失效对比验证。结果表明:汗液中的卤素氯离子与电极中铝层发生电化学腐蚀,致使电极与外延层界面间黏附力降低,最终导致芯片电极脱离后失效。The failure phenomenon of semiconductor light emitting diode LED chips containing aluminum reflective electrodes under the action of human sweat was studied.Through scanning electron microscopy(SEM)and X-ray energy dispersive spectrascopy(EDS),the composition of different areas on the failed samples was analyzed contrastively.By simulating human sweat contamination test,the chip with optimized electrode process and structure was verified for comparison of failure.The results showed that the halogen chloride ions in sweat and the aluminum layer in the electrode were electrochemically corroded,which reduced the adhesion between the interface between the electrode and the epitaxial layer,and eventually led to the failure of the chip electrode after separation.

关 键 词：发光二极管 铝电极 汗液 腐蚀 

分 类 号：TN383.1[电子电信—物理电子学] TG174.36[金属学及工艺—金属表面处理]