Gecko-Inspired Slant Hierarchical Microstructure-Based Ultrasensitive Iontronic Pressure Sensor for Intelligent Interaction  

作　　者：Yongsong Luo Xiaoliang Chen Hongmiao Tian Xiangming Li Yangtianyu Lu Yang Liu Jinyou Shao 

机构地区：[1]Micro-and Nano-Technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an JiaotongUniversity,Xi'an710049,China [2]Frontier Institute of Science and Technology(FIST),Xian Jiaotong University,Xi'an 710049,China

出　　处：《Research》2022年第4期1-13,共13页研究（英文）

基　　金：This work was supported by the National Key Research and Development Programof China(Grant No.2021YFB2011500);National Natural Science Foundation of China(Grant Nos.52025055 and 51905415);Natural ScienceFoundationofShaanxiProvince,China(2019JLM-5);Institutional Foundation of the First Affiliated Hospital of Xi'an Jiaotong University,China Gas Turbine Establishment of Aero Engine Corporation of China(GJCZ-2019-0039);National Postdoctoral Program for InnovativeTalents(No.BX20180251);hina Postdoctoral ScienceFoundation(No.2019M653588);YoungTalent Fund of UniversityAssociationfor ScienceandTechnology in Shaanxi,China(20200404).

摘　　要：Highly sensitive flexible pressure sensors play an important role to ensure the safety and friendliness during the human-robot interaction process.Microengineering the active layer has been shown to improve performance of pressure sensors.However,the current structural strategy almost relying on axial compression deformation suffers structural stifening,and together with the limited area growth efficiency of conformal interface,essentially limiting the maximum sensitivity.Here,inspired by the interface contact behavior of gecko's feet,we design a slant hierarchical microstructure to act as an electrode contacting with an ionic gel layer,fundamentally eliminating the pressure resistance and maximizing functional interface expansion to achieving ultrasensitive sensitivity.Such a structuring strategy dramatically improves the relative capacitance change both in the low-and high-pressure region,thereby boosting the sensitivity up to 36000kPa^(-1) and effective measurement range up to 30okPa.To verify the advantages of high sensitivity,the sensor is integrated with a soft magnetic robot to demonstrate a biomimetic Venus flytrap.The ability to perceive weak stimuli allows the sensor to be used as a sensory and feedback window,realizing the capture of small live insects and the transportation of fragile objects.

关 键 词：ROBOT BOOSTING interface 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]