Experimental investigation on the unbalanced Mach–Zehnder interferometer on lithium niobate thin film  

作　　者：Xuerui Sun Yinan Wu Chuanyi Lu Yuting Zhang Hao Li Shijie Liu Yuanlin Zheng Xianfeng Chen 孙雪芮;吴忆南;卢川艺;张玉婷;黎浩;刘时杰;郑远林;陈险峰(State Key Laboratory of Advanced Optical Communication Systems and Networks,School of Physics and Astronomy,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Research Center for Quantum Sciences,Shanghai 201315,China;Collaborative Innovation Center of Light Manipulation and Applications,Shandong Normal University,Jinan 250358,China)

机构地区：[1]State Key Laboratory of Advanced Optical Communication Systems and Networks,School of Physics and Astronomy,Shanghai Jiao Tong University,Shanghai 200240,China [2]Shanghai Research Center for Quantum Sciences,Shanghai 201315,China [3]Collaborative Innovation Center of Light Manipulation and Applications,Shandong Normal University,Jinan 250358,China

出　　处：《Chinese Optics Letters》2022年第10期71-75,共5页中国光学快报（英文版）

基　　金：supported by the National Natural Science Foundation of China(Nos.12074252,62022058,62005159,and 11734011);National Key Research and Development Program of China(Nos.2017YFA0303701 and 2018YFA0306301);Shanghai Municipal Science and Technology Major Project(No.2019SHZDZX01-ZX06);Shanghai Rising-Star Program(No.20QA1405400);Shanghai Jiao Tong University(No.21X010200828)。

摘　　要：We design and fabricate an unbalanced Mach–Zehnder interferometer(MZI)via electron beam lithography and inductively coupled plasma etching on lithium niobate thin film.The single unbalanced MZI exhibits a maximum extinction ratio of 32.4 dB and a low extra loss of 1.14 dB at the telecommunication band.Furthermore,tunability of the unbalanced MZI by harnessing the thermo-optic and electro-optic effect is investigated,achieving a linear tuning efficiency of 42.8 pm/℃ and 55.2 pm/V,respectively.The demonstrated structure has applications for sensing and filtering in photonic integrated circuits.

关 键 词：lithium niobate Mach-Zehnder interferometer electro-optic effect thermo-optic effect nanowaveguide 

分 类 号：TN256[电子电信—物理电子学]