Sputter Deposited Carbon Material based Fabry-Perot Sensor and Downhole Application  

作　　者：WANG Yingying LIU Xiaohui CHEN Xiaoan SUN Zhihui ZHAO Qingchao 王英英;LIU Xiaohui;CHEN Xiaoan;SUN Zhihui;ZHAO Qingchao(Laser Institute,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250103,China;School of Geophysics and Information Technology,China University of Geosciences(Beijing),Beijing 100191,China;Logging Technology Research Institute,China National Logging Corporation,Xi’an 710077,China;Shandong Computer Science Center,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250014,China)

机构地区：[1]Laser Institute,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250103,China [2]School of Geophysics and Information Technology,China University of Geosciences(Beijing),Beijing 100191,China [3]Logging Technology Research Institute,China National Logging Corporation,Xi’an 710077,China [4]Shandong Computer Science Center,Qilu University of Technology(Shandong Academy of Sciences),Jinan 250014,China

出　　处：《Journal of Wuhan University of Technology(Materials Science)》2022年第6期1143-1149,共7页武汉理工大学学报（材料科学英文版）

基　　金：by the National Natural Science Foundation of China(No.61605101);the Natural Fund of Shandong Province(Nos.ZR2021MF127 and ZR2020LLZ010);the Peixin Fund of Qilu University of Technology(No.2022PX074)。

摘　　要：To prevent hydrogen-induced loss and achieve long-term effective parameters monitoring in harsh downhole environment,we proposed a Fabry-Perot sensor with vacuum sputter deposited carbon coating film,in which we employed a deposition technology with a higher particle kinetic energy,closer substrate adhesion,and denser films,to deposit the coating film on the surface of the quartz capillary glass tube to protect the sensor from corrosion.The sensitivity and accuracy of the Fabry-Perot sensor with carbon film deposition can reach 369 nm/MPa and 0.02%FS,respectively.Meanwhile,the sensor has less hysteresis error and good pressure linearity of more than 0.99999 for repeatable pressure measurement.The downhole practice monitoring data indicated that this fiber-optic sensor exhibited excellent performance and the sputter deposited carbon coating can effectively decrease hydrogen loss.

关 键 词：quartz substrate Fabry-Perot sensor vacuum sputtering carbon coating material 

分 类 号：TE937[石油与天然气工程—石油机械设备] TP212[自动化与计算机技术—检测技术与自动化装置]