硅基光开关切换延时线芯片延时测量稳定性研究  

Delay Measurement Stability of Silicon-Based Optical Switching Delay Line Chip

作　　者：史上清 刘鹏程[1] 恽斌峰[1] Shi Shangqing;Liu Pengcheng;Yun Binfeng(Advanced Photonics Center,Southeast University,Nanjing 210096,Jiangsu,China)

机构地区：[1]东南大学先进光子学中心,江苏南京210096

出　　处：《光学学报》2022年第20期106-111,共6页Acta Optica Sinica

基　　金：国家重点研发计划(2018YFB2201800);国家自然科学基金(62171118)。

摘　　要：硅基光开关切换延时线芯片以其结构简单、瞬时带宽大等优点在微波光子波束形成领域中有着很好的应用前景,但其高精度延时测量还存在很多难点,影响片上延时测量稳定性的因素亟待研究。通过对基于光矢量网络分析的延时测试链路、参考直波导和延时线的延时稳定性进行对比测试,实验分析了芯片延时测量稳定性的影响因素。结果表明,芯片插损、输入/输出光栅耦合器封装和延时线内部残余的马赫-曾德尔干涉都将使硅基光开关切换延时线芯片的片上延时测量稳定性变差。Silicon-based optical switching delay line chip has a good application prospect in microwave photonic beamforming due to its simple structure and large instantaneous bandwidth.However,there are many difficulties in it’s high-precision delay measurement,and the factors affecting the delay measurement stability are needed to be studied.By comparing the delay measurement stabilities of a delay test link based on optical vector network analyzing system,alignment waveguide and delay line,the main factors affecting the delay measurement stability of silicon-based optical switching delay line are analyzed experimentally.Experimental results show that chip insertion loss,input/output grating coupler package and residual Mach-Zehnder interference of delay line chip will deteriorate the on-chip delay measurement stability.

关 键 词：集成光学 光开关切换延时线芯片 光矢量网络分析 延时测量 稳定性 

分 类 号：O439[机械工程—光学工程]