碳钢MOPA光纤激光器雕刻工艺优化  

Process Optimization for MOPA Fiber Laser Engraving of Carbon Steel

作　　者：张敦港 罗文殊 董静 王海林 朱晓[1,2] 朱广志[1,2] Zhang Dungang;Luo Wenshu;Dong Jing;Wang Hailin;Zhu Xiao;Zhu Guangzhi(National Engineering Research Center for Laser Processing,Wuhan 430074,Hubei,China;School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China)

机构地区：[1]激光加工国家工程研究中心,湖北武汉430074 [2]华中科技大学光学与电子信息学院,湖北武汉430074

出　　处：《光学学报》2022年第20期112-118,共7页Acta Optica Sinica

基　　金：湖北省重点研发计划(2020BHB015)。

摘　　要：高功率纳秒光纤激光器已经被广泛应用于激光雕刻中。以碳钢作为研究材料,使用主振荡功率放大(MOPA)光纤激光器系统研究了脉冲宽度、能量密度和脉冲重复频率(PRF)对激光雕刻结果的影响,且每组参数作用下的材料去除率(MRR)和平均表面粗糙度(Sa)使用三维(3D)轮廓仪进行测量。研究发现:使用较长的脉冲宽度和较高的能量密度会得到较大的MRR和Sa;使用较短的脉冲宽度和较高的能量密度也能得到较大的MRR和Sa,这是较高的脉冲重叠率造成的;存在临界PRF,该值在使得MRR较大的同时,可使得Sa较小。最后,使用优化的工艺参数得到了高质量、高MRR的雕刻效果。High-power nanosecond fiber lasers have been widely used in laser engraving.In this paper,the effects of pulse width,energy density,and pulse repetition frequency(PRF)on laser engraving results are studied by using a master oscillator power amplifier(MOPA)fiber laser system,with carbon steel as the research material.The material removal rate(MRR)and average surface roughness(Sa)of each group of parameters are measured by a three-dimensional(3D)profilometer.It is found that longer pulse width and higher energy density can result in larger MRR and Sa.Larger MRR and Sacan also be obtained with short pulse width and high energy density,which is caused by a high pulse overlap rate.There is a critical PRF that can simultaneously make MRR large and Sasmall.Finally,the optimized process parameters are used to achieve the engraving effects of high quality and high MRR.

关 键 词：激光器 深度雕刻 MOPA光纤激光器 材料去除率 平均表面粗糙度 

分 类 号：TN249[电子电信—物理电子学]