基于光斑图像法的运动平行度测量与优化  

Measurement and Optimization of Movement Parallelism Based on Spot Image Method

作　　者：刘星 许孝忠 魏涛 魏劲松[1] Liu Xing;Xu Xiaozhong;Wei Tao;Wei Jingsong(Laboratory of Micro-Nano Optoelectronic Materials and Devices,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;School of Materials Science and Engineering,Suzhou University of Science and Technology,Suzhou Key Laboratory for Nanophotonic and Nanoelectronic Materials and Its Devices,Suzhou 215009,Jiangsu,China)

机构地区：[1]中国科学院上海光学精密机械研究所微纳光电子功能材料实验室,上海201800 [2]中国科学院大学材料与光电研究中心,北京100049 [3]苏州科技大学材料科学与工程学院,苏州市微纳光电材料与传感器重点实验室,江苏苏州215009

出　　处：《光学学报》2022年第19期83-91,共9页Acta Optica Sinica

基　　金：国家自然科学基金(51672292,61627826)。

摘　　要：运动平行度是运动台的核心参数之一,对运动台性能有直接影响。提出一种基于光斑图像的测量方法用于精确测量运动平行度。在理论推导和分析的基础上,搭建了一套精度优于50 nm的运动平行度测量系统。在此测量系统上对运动台进行运动平行度测量,运动平行度误差为11.66μm。在根据上述结果对运动台进行优化后,最佳运动平行度误差可以达到6.22μm。为了验证所提方法的可行性,使用位移传感器再次测量运动平行度。位移传感器测量结果与光斑图像法测量结果的均方根误差优于248 nm,即两种测量结果基本一致。Movement parallelism is one of the key parameters of motorized stages,and it can directly affect the performance of the stages.A spot image method for accurately measuring the movement parallelism is proposed.In addition,based on theoretical research and analysis,a measurement system with a precision better than 50 nm is set up.Utilizing this measurement system,movement parallelism of the motorized stage is measured,and the movement parallelism error is 11.66μm.After optimizing the motorized stage according to the above results,the optimal movement parallelism error can reach 6.22μm.In order to verify the feasibility of the proposed method,a displacement sensor is applied to re-measure the movement parallelism.The root-mean-square error between the measurement results of the displacement sensor and that of spot image method is lower than 248 nm.In other words,the two measurement results are basically the same.

关 键 词：测量 表面测量 运动平行度 光斑图像法 图像处理 光学系统 

分 类 号：O435[机械工程—光学工程]