光栅信号补偿及软件细分算法研究  

Research on Grating Signal Compensation and Software Subdivision Algorithm

作　　者：任东旭[1] 孔明旭 李彬[1] 班楠楠 Ren Dongxu;Kong Mingxu;Li Bin;Ban Nannan(School of Mechatronics Engineering,Zhongyuan University of Technology,Zhengzhou 451191,China;不详)

机构地区：[1]中原工学院机电学院,郑州市451191

出　　处：《工具技术》2022年第11期153-156,共4页Tool Engineering

基　　金：国家自然科学基金(51905558,51975599)。

摘　　要：光栅线性位移传感器作为精密测量的研究对象,其对栅距细分提高分辨率的研究具有重要地位。根据光栅信号的数学模型,提出了基于离散傅里叶变换预处理和最小二乘法椭圆拟合并根据输出信号各误差依次补偿的组合方法。对补偿后的信号提出了一种线性化处理的软件细分方法,该细分方法可以实现16倍的栅距细分。利用MATLAB软件对光栅信号的补偿算法和细分算法进行了仿真,验证了所提出算法的可行性。As the research object of precision measurement, grating linear displacement sensor plays an important role in the research of grid spacing subdivision and improving resolution.According to the mathematical model of grating signal, a combined method based on discrete Fourier transform preprocessing and least square ellipse fitting is proposed.A software subdivision method of linearization processing is proposed for the compensated signal, which can realize 16 times grid spacing subdivision.The compensation algorithm and subdivision algorithm of grating signal are simulated and verified by MATLAB to verify the feasibility of the proposed algorithm.

关 键 词：光栅信号 离散傅里叶变换 软件细分算法 最小二乘法 

分 类 号：TG806[金属学及工艺—公差测量技术] TP391.9[自动化与计算机技术—计算机应用技术]