激光微纳加工微槽道试验研究  

Experimental research on laser micro-nano machining micro-channel

作　　者：高羡明 郭宁波 张功学[1] 华梦怡 李夏霜 GAO Xian-ming;GUO Ning-bo;ZHANG Gong-xue;HUA Meng-yi;LI Xia-shuang(College of Mechanical and Electrical Engineering,Shaanxi University of Science&Technology,Xi′an 710021,China;School of Aeronautics,Northwestern Polytechnic University,Xi′an 710072,China)

机构地区：[1]陕西科技大学机电工程学院,陕西西安710021 [2]西北工业大学航空学院,陕西西安710072

出　　处：《陕西科技大学学报》2023年第1期138-143,共6页Journal of Shaanxi University of Science & Technology

基　　金：陕西省科技厅自然科学基金项目(2021JQ-554);陕西省教育厅专项科研计划项目(19JK0139);陕西科技大学博士科研启动基金项目(2017BT-02)。

摘　　要：针对100 mm×100 mm×2 mm铜制均热板进行微槽道激光加工试验研究,初步探究激光重复频率、扫描速度和扫描方式等工艺参数对微槽道微观结构及表面质量的影响规律,并对9组试件微槽道深度及表面质量进行了试验分析.结果表明,激光扫描速度越快,槽道表面质量越差;重复频率越高,表面形貌越光滑;使用多次加工方式比一次加工成型得到的微槽道热影响低,表面质量高.最终确定,铜制材料在填充间距0.01 mm、功率18 W、激光扫描速度300 mm/s、频率50 KHz、多次加工工艺下的微槽道加工工艺质量最优.The experimental study of micro-channel laser processing was carried out for a 100 mm×100 mm×2 mm copper vapor chamber,and the influence of process parameters such as laser repetition frequency,scanning speed and scanning method on the micro-channel microstructure and surface quality was preliminarily studied.The micro-channel depth and surface quality of 9 groups of specimens were tested and analyzed.The results show that the faster the laser scanning speed,the worse the surface quality of the channel;the higher the repetition frequency,the smoother the surface morphology;the micro-channel obtained by multiple processing methods has lower thermal influence and higher surface quality than one-time processing.It was finally determined that the micro-groove processing quality of the copper material under the filling pitch of 0.01 mm,the power of 18 W,the laser scanning speed of 300 mm/s,the frequency of 50 KHz,and the multiple processing technology was the best.

关 键 词：均热板微槽道 激光加工 加工工艺 微观形貌 表面质量 

分 类 号：TH166[机械工程—机械制造及自动化]