仿跳虫表皮柔性微结构阵列复型转移制备  

Replication,Transfer and Fabrication of Flexible Microstructural Arrays Inspired From Springtail Cuticle

作　　者：张坤[1,2] 许晓慧 李昕然 郭泽琦 吕湘连 何洋[1,2] 苑伟政[1,2] ZHANG Kun;XU Xiaohui;LI Xinran;GUO Zeqi;LÜXianglian;HE Yang;YUAN Weizheng(Key Lab of Micro/Nano Systems for Aerospace,Ministry of Education,Northwestern Polytechnical University,Xi’an 710072,China;Shaanxi Key Lab of MEMS/NEMS,Northwestern Polytechnical University,Xi’an 710072,China;Xidian University,Xi’an 710126,China)

机构地区：[1]西北工业大学空天微纳系统教育部重点实验室,西安710072 [2]西北工业大学陕西省微/纳米系统重点实验室,西安710072 [3]西安电子科技大学,西安710126

出　　处：《航空制造技术》2022年第23期72-80,共9页Aeronautical Manufacturing Technology

基　　金：GF科技重点实验室基金(6142201200403);国家自然科学基金面上项目(51875478)。

摘　　要：跳虫表皮独特的疏水耐压凹角微结构,为开展飞机表面防/除冰研究提供了新的思路。以跳虫表皮为仿生对象,制备了柔性疏水微结构。提出了“复型转移”的制备方法,针对复型和转移过程中出现的结构变形、结构破裂问题,分别通过“软刀硬模”和“界面黏附控制”工艺进行改进。基于“软硬结合”的思想采取“软刀硬模”的刮平方式以避免残余聚二甲基硅氧烷(PDMS)层导致的结构变形,以聚对苯二甲酸乙二醇酯(PET)薄膜替代PDMS转移层并进行表面改性,以避免结构层和转移层同质材料之间产生过度黏附。PET薄膜经氧等离子体改性处理,表面接触角由70°减小为15°;表面轮廓算术平均偏差Ra由112.15 nm增加到199.74 nm,提升了78.1%;氧/碳(O/C)含量比由0.35增加到0.45。微结构表面接触角为125.2°,弹跳行为中液滴回缩明显。“复型转移”的方法成功实现了柔性微结构的制备,“软刀硬模”的方式明显减小了微结构变形,结构成功复型且变形得到有效控制。PET薄膜在表面改性后表面活性增加,结构成功转移且破裂减少。经测试,制备的仿跳虫柔性微结构具有良好的疏水性能。The unique hydrophobic and pressure-resistant concave angle microstructure of the springtail cuticle provides a new research idea for aircraft anti-icing and drag reduction with super hydrophobic air film of underwater vehicles.In this paper,a flexible hydrophobic microstructure was prepared by taking the springtail cuticle as the biomimetic object.The preparation method of“duplicating transfer”was put forward.In order to solve the structural deformation and structural rupture problems in the process of duplicating and transferring,the technology of“soft knife and hard mold”and“interface adhesion control”were respectively improved.Based on the idea of“combination of soft and hard”,the scraping method of“soft knife and hard mold”was adopted to avoid the structural deformation caused by residual PDMS layer.The PDMS transfer layer was replaced by PET film and surface modification was carried out to avoid excessive adhesion between the structure layer and the homogeneous material of the transfer layer.The surface contact angle of PET film was reduced from 70°to 15°by oxygen plasma modification.The arithmetic mean deviation Ra of surface contour increased from 112.15 nm to 199.74 nm,which increased by 78.1%.Oxygen/carbon(O/C)ratio increased from 0.35 to 0.45.The contact angle of the microstructure surface is 125.2°,and the droplet retraction is obvious in the bouncing behavior.The method of“duplicating transfer”successfully realized the fabrication of flexible microstructure,and the method of“soft knife and hard mold”significantly reduced the microstructure deformation,and the structure was successfully duplicating and the deformation was effectively controlled.After surface modification,the surface activity of PET film is increased,the structure is successfully transferred and the rupture is reduced.The results show that the flexible microstructures have good hydrophobic properties.

关 键 词：跳虫 仿生 柔性微结构 聚二甲基硅氧烷(PDMS) 聚对苯二甲酸乙二醇酯(PET) 黏附控制 

分 类 号：V244.15[航空宇航科学与技术—飞行器设计]