大于10000:1的宽量程比热式质量流量计研究  

Ultra-High Range Ratio(>10000:1) Thermal Mass Flowmeter

作　　者：康乔乔 陶继方 李炎 赵佳[1,2] 张娟 田伟 KANG Qiaoqiao;TAO Jifang;LI Yan;ZHAO Jia;ZHANG Juan;TIAN Wei(Key Laboratory of Laser&Infrared System Ministry of Education,Shandong University,Qingdao 266237,China;School of Information Science and Engineering,Shandong University,Qingdao 266237,China;Center for Optics Research and Engineering,Shandong University,Qingdao 266237,China;Weifang Institute of Metrology,Weifang 261061,China;Qingdao Xinnovis Microsystem Co.Lid,Qingdao 266101,China)

机构地区：[1]山东大学激光与红外系统集成技术教育部重点实验室,青岛266237 [2]山东大学信息科学与工程学院,青岛266237 [3]山东大学光学高等研究中心,青岛266237 [4]潍坊计量所,潍坊261061 [5]青岛芯笙微纳电子科技有限公司,青岛266101

出　　处：《真空科学与技术学报》2022年第11期828-834,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：本文设计并研制了一种基于微机电系统(Micro Electro Mechanical Systems MEMS)流量芯片的高性能气体质量流量计,在保证精度的同时极大地扩宽了量程比这一关键技术参数,用于满足实验室、氢能、环保等产业对高精度、宽量程气体质量流量计的要求。在无分流情况下,通过理论分析和实验测试得到MEMS流量芯片的灵敏度和检测下限分别为:0.192 mV/sccm和2.707×10^(-3)mL/min,并以此设计了一种双模运算处理电路和分流流道设计,用来拓展流量计的测量量程范围。为了保证宽量程范围内的稳定性与准确性,对流量计内部的流道结构进行了流体仿真分析,并对双模运算处理电路进行了协同优化设计。测试结果表明该气体质量流量计的最小探测极限为0.659 mL/min,在0.1-100 slm范围内输出电压的测试结果的最大相对标准差为1.07%,流量波动的满量程误差为0.15%;在0-100 mL/min范围内输出电压的最大相对标准差为3.6%,流量波动的满量程误差为0.09%。该流量计在0.15%的满量程误差范围内可实现最大检测流量为100 slm,最小检测流量10 mL/min,可实现10000∶1的量程比,并具有较好的重复性和稳定性。A high-performance mass flowmeter based on a microelectromechanical flow sensor chip is developed. To meet the requirements of high precision and wide range gas mass flowmeter in semiconductor, hydrogen energy, environmental protection and other industries, we broaden the range ratio of the flowmeter under the same level of accuracy. The sensor chip with a sensitivity of 0.192 mV/sccm and a detection limitation of 2.707×10^(-3)mL/min is obtained. In the device design, we demonstrate a dual-mode amplifier processing circuit and develop a miniature flow diverter to realize the wide range ratio of the mass flowmeter. The dual-mode amplifier processing circuit and the flow diverter are simulated and optimized. The flowmeter is tested and characterized in detail. The limit of detection(LOD) of this mass flowmeter is 0.659 mL/min. In the full scale range of 0.15%, the maximum detection flow is100 slm and the minimum is 10 mL/min, which can achieve a range ratio of 10000∶1. The maximum relative error is1.07% in the range of 0.1-100 slm and 3.6% in 0-100 mL/min, and the measurement results show good repeatability and stability.

关 键 词：质量流量计 微机电 宽量程比 

分 类 号：TH814.6[机械工程—仪器科学与技术]