基于仿生微结构的高性能柔性压力传感器  

High performance flexible pressure sensor based onbionic microstructure

作　　者：杨红波 陈文东[2] YANG Hongbo;CHEN Wendong(School of Electronic and Electrical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China;School of Information Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)

机构地区：[1]郑州科技学院电子与电气工程学院,河南郑州450064 [2]郑州科技学院信息工程学院,河南郑州450064

出　　处：《传感器与微系统》2023年第1期98-100,104,共4页Transducer and Microsystem Technologies

基　　金：河南省教育厅高校重点研究项目(22B510017)。

摘　　要：柔性压阻式压力传感器可用于对人体姿态变化进行准确的检测。设计了一种新型柔性压阻式压力传感器。采用了聚二甲基硅氧烷(PDMS)基底、石墨烯油墨等材料对传感器进行了制备,阐述了制备的具体过程。然后,针对传感器的表面形貌和性能进行了测试分析,结果显示可以达到较高的检测范围12.8 Pa~25 kPa和灵敏度1.77 kPa^(-1)。另外,响应速率为26 ms;循环压力测试下保持了较高的稳定性,通过对人体腕部以及手指弯曲的检测也验证了其应用的效果。Flexible piezoresistive pressure sensor can be used to accurately detect the change of human posture.A new type of flexibe piezoresistive pressure sensor is designed,PDMS substrate,graphene ink and other materials are used to prepare the sensor,and the specific process of preparation is described.Then the surface morphology and performance of the sensor are tested and analyzed,and the results show that the sensor can reach a high detection range of 12.8 Pa~25 kPa and sensitivity of 1.77 kPa-1.In addition,the response rate is relatively fast,basically 26 ms.Under the cyclic pressure test,it maintains a high stability,and its application effect is also verified through the detection of human wrist and finger bending.

关 键 词：压阻式压力传感器 仿生白果叶微结构 聚二甲基硅氧烷 柔性材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]